Silicon microcantilever hotplates with high temperature uniformity

Sensors and Actuators, A: Physical

Volumn 152, Issue 2, 2009, Pages 160-167

  Privorotskaya, Natalya L ^a   King, William P ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

Atomic force microscopy; Cantilever sensor; Microcantilever; Microhotplate; Thermal sensor

Indexed keywords

AFM; CANTILEVER SENSOR; CANTILEVER SENSORS; FREE END; HIGH TEMPERATURE; HIGHEST TEMPERATURE; HOT PLATES; INTEGRATED HEATER; LASER VIBROMETRY; MICRO-CANTILEVERS; MICROCANTILEVER; MICROHOTPLATE; SINGLE CRYSTAL SILICON; TEMPERATURE RANGE; TEMPERATURE UNIFORMITY; THERMAL SENSOR; UNIFORM TEMPERATURE;

ATOMS; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; DOPING (ADDITIVES); MECHANICAL PROPERTIES; NANOCANTILEVERS; SILICON WAFERS; SINGLE CRYSTALS;

ATOMIC FORCE MICROSCOPY;

EID: 67349250905     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.03.020     Document Type: Article

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