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Volumn , Issue , 2003, Pages 161-162
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Biaxial MEMS raster scanner with linear ramp drive
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Author keywords
Coils; Copper; Displays; Energy consumption; Glass; Magnets; Micromechanical devices; Mirrors; Packaging; Resonant frequency
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Indexed keywords
COPPER;
DISPLAY DEVICES;
ENERGY UTILIZATION;
GLASS;
MAGNETS;
MIRRORS;
MOEMS;
PACKAGING;
SCANNING;
COILS;
LASER SCANNING;
LINEARITY ERRORS;
MICROMECHANICAL DEVICE;
RASTER SCANNERS;
WAVE FORMS;
NATURAL FREQUENCIES;
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EID: 65549146418
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/OMEMS.2003.1233516 Document Type: Conference Paper |
Times cited : (4)
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References (4)
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