Single-crystal-silicon continuous membrane deformable mirror array for adaptive optics in space-based telescopes

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 13, Issue 2, 2007, Pages 162-167

  Jung, Il Woong ^a,b   Peter, Yves Alain ^a,c   Carr, Emily ^d   Wang, Jen Shiang ^a,e   Solgaard, Olav ^a,b  

^a IEEE   (United States)

^b STANFORD UNIVERSITY   (United States)

^c ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^d Glimmerglass Networks   (United States)

^e Brion Technologies Inc   (United States)

Author keywords

Adaptive optics (AO); Continuous membrane; Microelectromechanical system (MEMS); Micromirror array; Microoptoelectromechanical system (MOEMS); Piston actuator; Silicon on insulator (SOI); Single crystal silicon (SCS); Space telescope

Indexed keywords

CONTINUOUS MEMBRANE; MICROMIRROR ARRAY; MICROOPTOELECTROMECHANICAL SYSTEM (MOEMS); PISTON ACTUATORS; SINGLE CRYSTAL SILICON (SCS); SPACE BASED TELESCOPES;

ADAPTIVE OPTICS; ERROR CORRECTION; MEMS; MIRRORS; SILICON; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS;

SPACE TELESCOPES;

EID: 34247490320     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2007.893560     Document Type: Article

References (8)

1. P. Krulevitch, P. Bierden, T. Bifano, E. Carr, C. Dimas, H. Dyson, M. Helmbrecht, P. Kurczynski, R. Muller, S. Olivier, Y. A. Peter, B. Sadoulet, O. Solgaard, and E. H. Yang, "MOEMS spatial light modulator development at the center for adaptive optics," Proc. SPIE, vol. 4983, pp. 227-234, Jan. 2003.
2. Y. A. Peter, E. Carr, J. Mansell, and O. Solgaard, "Optical MEMS for adaptive optics applications," 1st Int. Symp. Integr. Optoelectron. 201st Meeting Electrochem. Soc., Philadelphia, PA, 2002, pp. 361-367.
3. H. Ford, M. Clampin, G. Illingwoith, J. Krist, S. Olivier, L. Petro, and G. Sommagren, "Requirements of an optical 8-m space telescope with a MEMs deformable mirror to detect Earth-like planets around nearby stars," Proc. SPIE, vol. 4854, pp. 554-557, Feb. 2003.
4. T. G. Bifano, R. K. Mali, J. K. Dorton, J. Perreault, N. Vandelli, M. N. Horenstein, and D. A. Castañon, "Continuous-membrane surface-micromachined silicon deformable mirror," Opt. Eng., vol. 36, pp. 1354-1360, May 1997.
5. J. Mansell and R. L. Byer, "Micromachined silicon deformable mirror," Proc. SPIE, vol. 3353, pp. 896-901, Sep. 1998.
6. E. H. Yang and D. V. Wiberg, "A wafer-scale membrane transfer process for the fabrication of optical quality, large continuous membranes," J. Microelectromech. Syst., vol. 12, pp. 804-815, Dec. 2003.
7. P. Kurczynski, G. R. Bogart, W. Lai, V. Lifton, W. M. Mansfield, J. A. Tyson, B. Sadoulet, and D. R. Williams, "Electrostatically actuated membrane mirrors for adaptive optics," Proc. SPIE, vol. 4983, pp. 305-313, 2003.
8. Y. A. Peter, E. Carr, and O. Solgaard, "Segmented deformable micromirror for free-space optical communication," IEEE/LEOS Int. Conf. Opt. MEMS, Switzerland, vol. 20-23, pp. 197-198, Aug. 2002.