Fully-functional tip-tilt-piston micromirror array

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Volumn , Issue , 2006, Pages 38-39

  Milanović, Veljko ^a   Castelino, Kenneth ^a   McCormick, Daniel ^a  

^a Adriatic Research Institute   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 41549114702     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/omems.2006.1708253     Document Type: Conference Paper

References (6)

1. D. Hah, et al, "A low voltage, large scan angle MEMS micromirror array with hidden vertical comb-drive actuators for WDM routers," OFC 2002, pp. 92-93, Mar. 2002.
2. Solgaard, O., et al, "Microoptical phased arrays for spatial and spectral switching", IEEE Comm. Magazine, vol. 41, no. 3, pp. 96-102, Mar. 2003.
3. J.-C. Tsai, et al, "Analog Micromirror Arrays with Orthogonal Scanning Directions for Wavelength Selective 1×N2 Switches," Transducers '03, pp. 1776-1779, Jun. 2003.
4. V. Milanović, D. T. McCormick, G. Matus, "Gimbal-less Monolithic Silicon Actuators For Tip-Tilt-Piston Micromirror Applications," IEEE J. of Select Topics in Quantum Electronics,Volume: 10, Issue: 3, May-June 2004, Pages:462 - 471.
5. V. Milanović, G. Matus, D. T. McCormick, "Tip-Tilt-Piston Actuators for High Fill-Factor Micromirror Arrays," at the Hilton Head 2004 Solid State Sensor, Actuator and Microsystems Workshop, Hilton Head, SC, Jun. 6-10, 2004.
6. MEMS Precision Instruments, www.memspi.com.