Tunable light grating integrated with high-voltage driver ic for image projection display

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 147-150

  Takahashi, Kazuhiro ^a,b   Fujita, Hiroyuki ^a   Toshiyoshi, Hiroshi ^a,b   Suzuki, Kazuhiro ^c   Funaki, Hideyuki ^c   Itaya, Kazuhiko ^c  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

^c TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMOBILE DRIVERS; CHARGE COUPLED DEVICES; CMOS INTEGRATED CIRCUITS; COMPOSITE MICROMECHANICS; DATA STORAGE EQUIPMENT; DISPLAY DEVICES; ELECTRON BEAM LITHOGRAPHY; ELECTROSTATIC ACCELERATORS; ELECTROSTATIC ACTUATORS; LIGHT; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; METALLIC COMPOUNDS; METALS; MICROELECTROMECHANICAL DEVICES; MONOLITHIC INTEGRATED CIRCUITS; MOS DEVICES; NETWORKS (CIRCUITS); NONMETALS; OPTICAL PROJECTORS; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR MATERIALS; SILICON; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

DEEP REACTIVE ION ETCHING; DRIVE VOLTAGES; DRIVER CIRCUITS; ELECTROSTATIC ACTUATIONS; GRATING LIGHT VALVES; HIGH VOLTAGES; IMAGE PROJECTIONS; INTERNATIONAL CONFERENCES; METAL-OXIDE SEMICONDUCTORS; MICRO-ELECTRO MECHANICAL SYSTEMS; MONOLITHIC INTEGRATIONS; OPTICAL DIFFRACTIONS; OPTICAL LIGHT; POST-PROCESSING; SILICON-ON -INSULATOR; THICK SOI;

REACTIVE ION ETCHING;

EID: 52249090217     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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