Void shape evolution and formation of silicon-on-nothing structures during hydrogen annealing of hole arrays on Si(001)

Journal of Applied Physics

Volumn 105, Issue 8, 2009, Pages

  Sudoh, K ^a   Iwasaki, H ^a   Hiruta, R ^b   Kuribayashi, H ^b   Shimizu, R ^b  

^a OSAKA UNIVERSITY   (Japan)

^b FUJI ELECTRIC CO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CYLINDRICAL HOLES; HOLE ARRAYS; HYDROGEN ANNEALING; NUMERICAL SIMULATIONS; SHAPE CHANGES; SI (001) SUBSTRATES; SI SUBSTRATES; SI(0 0 1); SILICON ON NOTHINGS; SQUARE ARRAYS; STRUCTURAL EVOLUTIONS; VOID COALESCENCES; VOID SHAPES;

COALESCENCE; HYDROGEN; SUBSTRATES; SURFACE DIFFUSION;

SILICON;

EID: 65549090387     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3116545     Document Type: Article

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