Annealing instabilities in small fabricated structures

Surface Science

Volumn 372, Issue 1-3, 1997, Pages

  Tanaka, So ^a   Umbach, C C ^a   Blakely, Jack ^a  

^a School of Operations Research and Industrial Engineering   (United States)

Author keywords

Scanning electron microscopy; Semiconductor surfaces; Silicon; Surface morphology; Surface tension

Indexed keywords

ANNEALING; FREE ENERGY; MASS TRANSFER; MORPHOLOGY; SURFACE PHENOMENA; SURFACE TENSION; SURFACES;

CYLINDRICAL SECOND PHASE MATERIAL; RAYLEIGH INSTABILITY;

SILICON WAFERS;

EID: 0031075974     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(96)01263-0     Document Type: Article

References (16)

1. Lord Rayleigh, Lond. Math. Soc. Proc., 10 (1879) 4; Philos. Mag. 34 (1892) 145. In the second of these papers Rayleigh attributes the development of the theory of the instability of a long cylinder of liquid to Plateau and cites the reference: "Statique experimentale et theorique des liquides soumis aux seule forces moleculaires" (1873).
2. Lord Rayleigh, Lond. Math. Soc. Proc., 10 (1879) 4; Philos. Mag. 34 (1892) 145. In the second of these papers Rayleigh attributes the development of the theory of the instability of a long cylinder of liquid to Plateau and cites the reference: "Statique experimentale et theorique des liquides soumis aux seule forces moleculaires" (1873).
3. Lord Rayleigh, Lond. Math. Soc. Proc., 10 (1879) 4; Philos. Mag. 34 (1892) 145. In the second of these papers Rayleigh attributes the development of the theory of the instability of a long cylinder of liquid to Plateau and cites the reference: "Statique experimentale et theorique des liquides soumis aux seule forces moleculaires" (1873).
4. F.A. Nichols and W.W. Mullins, Trans AIME 233 (1965) 1840.
5. J.W. Cahn, Scr. Met. 13 (1979) 1069.
6. M.E. Keeffe, C.C. Umbach and J. Blakely, J. Phys. Chem. Solids 55 (1994) 965.
7. S. Tanaka, C.C. Umbach and J. Blakely, Appl. Phys. Lett. 68 (1996) 1966.
8. C.C. Umbach, M.E. Keeffe and J. Blakely, J. Vac. Sci. Technol. B 9 (1991) 721; A 11 (1993) 1830.
9. C.C. Umbach, M.E. Keeffe and J. Blakely, J. Vac. Sci. Technol. B 9 (1991) 721; A 11 (1993) 1830.
10. C. Herring, in: Physics of Powder Metallurgy, Ed. W.F. Kingston, (McGraw-Hill, New York, 1951).
11. W.W. Mullins, J. Appl. Phys. 30 (1959) 77.
12. J.M. Blakely, Appl. Phys. Lett. 11 (1967) 335.
13. H. Bonzel, E. Preuss and B. Steffen, Appl. Phys. A 35 (1984) 1.
14. D.E. Wolf and J. Villain, Phys. Rev. B 41 (1990) 2434; A. Rettori and J. Villain, J. Phys. (Paris) 49 (1988) 257.
15. D.E. Wolf and J. Villain, Phys. Rev. B 41 (1990) 2434; A. Rettori and J. Villain, J. Phys. (Paris) 49 (1988) 257.
16. M.E. Keeffe, PhD Thesis, Cornell University Materials Science Center Report #7910, 1994.