Investigation of shape transformation of silicon trenches during hydrogen annealing

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 43, Issue 4 A, 2004, Pages

  Kuribayashi, Hitoshi ^a   Hiruta, Reiko ^a   Shimizu, Ryosuke ^a   Sudoh, Koichi ^b   Iwasaki, Hiroshi ^b  

^a FUJI ELECTRIC CO   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

Corner rounding; Hydrogen anneal; Silicon; Surface self diffusion; Transformation; Trench

Indexed keywords

ANISOTROPY; ANNEALING; CHEMICAL VAPOR DEPOSITION; CONDENSATION; DIFFUSION; HYDROGEN; METALLIC FILMS; MOSFET DEVICES; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SILICA;

CORNER ROUNDING; HYDROGEN ANNEALING; SHAPE TRANSFORMATIONS; SILICON TRENCHES; SURFACE SELF-DIFFUSION;

SEMICONDUCTING SILICON;

EID: 2942527629     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.43.l468     Document Type: Article

References (18)

1. N. Fujishima and T. A. Salama: IEDM Tech. Dig. (1997) p. 359.
2. Y.-K. Choi, L. Chang, P. Ranade, J.-S. Lee, D. Ha, S. Balasubramanian, A. Agarwal, M. Ameen, T.-J. King and J. Bokor: IEDM Tech. Dig. (2002) p. 259.
3. K. Yamabe and K. Imai: IEEE Trans. Electron Devices ED-34 (1987) 1681.
4. T. Sato, N. Aoki, I. Mizushima and Y. Tsunashima: IEDM Tech. Dig. (1999) p. 517.
5. T. Sato, K. Mitsutake, I. Mizushima and Y. Tsunashima: Jpn. J. Appl. Phys. 39 (2000) 5033.
6. J. Kim, T. M. Roh, S.-G. Kim, D. W. Lee, J. G. Koo and K.-I. Cho: ISPSD (2001) p. 139.
7. S.-G. Kim, T. M. Roh, J. Kim, I. Y. Park, J. W. Kee, J. G. Koo, I.-H. Bae and K. I. Cho: J. Cryst. Growth 255 (2003) 123.
8. S. Tanaka, C. C. Umbach and J. M. Blakely: Appl. Phys. Lett. 68 (1996) 1966.
9. C. C. Umbach, M. E. Keeffe and J. M. Blakely: J. Vac. Sci. & Technol. A9 (1991) 1014.
10. T. Ogino, H. Hibino and Y. Homma: Jpn. J. Appl. Phys. 34 (1995) L668.
11. T. Ogino, H. Hibino and Y. Homma: Appl. Surf. Sci. 117/118 (1997) 642.
12. H. Kuribayashi, R. Hiruta, R. Shimizu, K. Sudoh and H. Iwasaki: J. Vac. Sci. & Technol. A21 (2003) 1279.
13. C. Herring: J. Appl. Phys. 21 (1950) 301.
14. W. W. Mullins: J. Appl. Phys. 28 (1957) 333.
15. K. Sudoh, H. Iwasaki, H. Kuribayashi, R. Hiruta and R. Shimizu: unpublished.
16. J. M. Bermond, J. J Metois, X. Egea and F. Floret: Surf. Sci. 330 (1995) 48.
17. Y. Nakabayashi, H. I. Osman, T. Segawa, K. Saito, S. Matsumoto, J. Murota, K. Wada and T. Abe: Jpn. J. Appl. Phys. 40 (2001) L181.
18. Y. Kumagai, K. Namba, T. Komeda and Y. Nishioka: J. Vac. Sci. & Technol. A16 (1998) 1775.