SCOPUS 정보 검색 플랫폼

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 9 A, 2004, Pages 5937-5941

Numerical study on shape transformation of silicon trenches by high-temperature hydrogen annealing

(5) Sudoh, Koichi a Iwasaki, Hiroshi a Kuribayashi, Hitoshi b Hiruta, Reiko b Shimizu, Ryosuke b

a OSAKA UNIVERSITY (Japan)

b FUJI ELECTRIC CO (Japan)

Author keywords

Hydrogen anneal; Shape transformation; Silicon; Simulation; Surface diffusion; Trench

Indexed keywords

ANNEALING; COMPUTER SIMULATION; CONDENSATION; CONTINUUM MECHANICS; DIFFERENTIAL EQUATIONS; DIFFUSION; ETCHING; EVAPORATION; FIELD EFFECT TRANSISTORS; HIGH TEMPERATURE EFFECTS; HYDROGEN; MOSFET DEVICES;

HYDROGEN ANNEALING; MULLIN'S THEORY; SHAPE TRANSFORMATIONS; SURFACE DIFFUSION; TRENCHES;

SILICON WAFERS;

EID: 9244225673 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.43.5937 Document Type: Article

Times cited : (42)

References (24)

1
- 0036508039
- H.-S. P. Wong: IBM. J. Res. & Dev. 46 (2002) 133.
- (2002) IBM. J. Res. & Dev. , vol.46 , pp. 133
- Wong, H.-S.P.¹

2
- 0032271790
- S. Matsuda, T. Sato, H. Yoshimura, Y. Takegawa, A. Sudo, I. Mizushima, Y. Tsunashima and Y. Toyoshima: IEDM Tech. Dig. (1998) p. 137.
- (1998) IEDM Tech. Dig. , pp. 137
- Matsuda, S.¹ Sato, T.² Yoshimura, H.³ Takegawa, Y.⁴ Sudo, A.⁵ Mizushima, I.⁶ Tsunashima, Y.⁷ Toyoshima, Y.⁸

3
- 2942545657
- J. Kim, T. M. Roh, S.-G. Kim, D. W. Lee, J. G. Koo and K.-I. Cho: ISPSD (2001) p. 139.
- (2001) ISPSD , pp. 139
- Kim, J.¹ Roh, T.M.² Kim, S.-G.³ Lee, D.W.⁴ Koo, J.G.⁵ Cho, K.-I.⁶

4
- 0036927657
- Y.-K. Choi, L. Chang, P. Rande, J.-S. Lee, D. Ha, S. Balasubramanian, A. Agarwal, M. Ameen, T.-J. King and J. Bokor: IEDM Tech. Dig. (2002) p. 259.
- (2002) IEDM Tech. Dig. , pp. 259
- Choi, Y.-K.¹ Chang, L.² Rande, P.³ Lee, J.-S.⁴ Ha, D.⁵ Balasubramanian, S.⁶ Agarwal, A.⁷ Ameen, M.⁸ King, T.-J.⁹ Bokor, J.¹⁰

5
- 0038717094
- S.-G. Kim, T. M. Roh, J. Kim, I. Y. Park, J. W. Lee, J. G. Koo, I.-H. Bae and K.-I. Cho: J. Cryst. Growth 255 (2003) 123.
- (2003) J. Cryst. Growth , vol.255 , pp. 123
- Kim, S.-G.¹ Roh, T.M.² Kim, J.³ Park, I.Y.⁴ Lee, J.W.⁵ Koo, J.G.⁶ Bae, I.-H.⁷ Cho, K.-I.⁸

6
- 0042029738
- H. Kuribayashi, R. Hiruta, R. Shimizu, K. Sudoh and H. Iwasaki: J. Vac. Sci. & Technol. A 21 (2003) 1279.
- (2003) J. Vac. Sci. & Technol. A , vol.21 , pp. 1279
- Kuribayashi, H.¹ Hiruta, R.² Shimizu, R.³ Sudoh, K.⁴ Iwasaki, H.⁵

7
- 0034268815
- T. Sato, K. Mitsutake, I. Mizushima and Y. Tsunashima: Jpn. J. Appl. Phys. 39 (2000) 5033.
- (2000) Jpn. J. Appl. Phys. , vol.39 , pp. 5033
- Sato, T.¹ Mitsutake, K.² Mizushima, I.³ Tsunashima, Y.⁴

8
- 21544450961
- W. W. Mullins: J. Appl. Phys. 28 (1957) 333.
- (1957) J. Appl. Phys. , vol.28 , pp. 333
- Mullins, W.W.¹

9
- 1842705631
- K. Mitsutake and Y. Ushiku: Ext. Abst. SSDM (1998) p. 198.
- (1998) Ext. Abst. SSDM , pp. 198
- Mitsutake, K.¹ Ushiku, Y.²

10
- 0029346127
- J. M. Bermond, J. J. Metois, J. C. Heyroud and C. Alfonso: Surf. Sci. 331-333 (1995) 855.
- (1995) Surf. Sci. , vol.331-333 , pp. 855
- Bermond, J.M.¹ Metois, J.J.² Heyroud, J.C.³ Alfonso, C.⁴

11
- 0001617455
- S. Tanaka, N. C. Bartelt, C. C. Umbach, R. M. Tromp and J. M. Blakely: Phys. Rev. Lett. 78 (1997) 3342.
- (1997) Phys. Rev. Lett. , vol.78 , pp. 3342
- Tanaka, S.¹ Bartelt, N.C.² Umbach, C.C.³ Tromp, R.M.⁴ Blakely, J.M.⁵

12
- 0033892291
- D. Lee and J. M. Blakely: Surf. Sci. 445 (2000) 32.
- (2000) Surf. Sci. , vol.445 , pp. 32
- Lee, D.¹ Blakely, J.M.²

13
- 36849136455
- C. Herring: J. Appl. Phys. 21 (1950) 301.
- (1950) J. Appl. Phys. , vol.21 , pp. 301
- Herring, C.¹

14
- 0000436987
- R. E. Honig and D. A. Kramer: RCA Rev. 30 (1969) 285.
- (1969) RCA Rev. , vol.30 , pp. 285
- Honig, R.E.¹ Kramer, D.A.²

15
- 0000163037
- D. J. Eaglesham, A. E. White, L. C. Feldman, N. Moriya and D. C. Jacobson: Phys. Rev. Lett. 70 (1993) 1643.
- (1993) Phys. Rev. Lett. , vol.70 , pp. 1643
- Eaglesham, D.J.¹ White, A.E.² Feldman, L.C.³ Moriya, N.⁴ Jacobson, D.C.⁵

16
- 0030172354
- Y.-N. Yang, E. S. Fu and E. D. Williams: Surf. Sci. 356 (1996) 101.
- (1996) Surf. Sci. , vol.356 , pp. 101
- Yang, Y.-N.¹ Fu, E.S.² Williams, E.D.³

17
- 2942527629
- H. Kuribayashi, R. Hiruta, R. Shimizu, K. Sudoh and H. Iwasaki: Jpn. J. Appl. Phys. 43 (2004) L468.
- (2004) Jpn. J. Appl. Phys. , vol.43
- Kuribayashi, H.¹ Hiruta, R.² Shimizu, R.³ Sudoh, K.⁴ Iwasaki, H.⁵

18
- 0039439270
- T. Komeda and Y. Kumagai: Phys. Rev. B 58 (1998) 1385.
- (1998) Phys. Rev. B , vol.58 , pp. 1385
- Komeda, T.¹ Kumagai, Y.²

19
- 0043190864
- Y. Kumagai, K. Namba, T. Komeda and Y. Nishioka: J. Vac. Sci. & Technol. A 16 (1998) 1775.
- (1998) J. Vac. Sci. & Technol. A , vol.16 , pp. 1775
- Kumagai, Y.¹ Namba, K.² Komeda, T.³ Nishioka, Y.⁴

20
- 0000361094
- J. E. Vasek, Z. Zhang, C. T. Salling and M. G. Lagally: Phys. Rev. B 51 (1995) 17207.
- (1995) Phys. Rev. B , vol.51 , pp. 17207
- Vasek, J.E.¹ Zhang, Z.² Salling, C.T.³ Lagally, M.G.⁴

21
- 3743050379
- J. Nara, T. Sasaki and T. Ohno: Phys. Rev. Lett. 79 (1997) 4421.
- (1997) Phys. Rev. Lett. , vol.79 , pp. 4421
- Nara, J.¹ Sasaki, T.² Ohno, T.³

22
- 3743140767
- S. Jeong and A. Oshiyama: Phys. Rev. Lett. 79 (1997) 4425.
- (1997) Phys. Rev. Lett. , vol.79 , pp. 4425
- Jeong, S.¹ Oshiyama, A.²

23
- 0034512646
- S. M. Lee, Y. H. Lee and N. Kim: Surf. Sci. 470 (2000) 89.
- (2000) Surf. Sci. , vol.470 , pp. 89
- Lee, S.M.¹ Lee, Y.H.² Kim, N.³

24
- 35949008358
- J. E. Northrup: Phys. Rev. B 44 (1991) 1419.
- (1991) Phys. Rev. B , vol.44 , pp. 1419
- Northrup, J.E.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.