Simulation of gas-phase kinetics in CHF3 : H2 : O2 mixtures

IEEE Transactions on Plasma Science

Volumn 35, Issue 6 PART 2, 2007, Pages 1691-1703

  Voloshin, Dmitry G ^a   Klopovskiy, Konstantin S ^a   Mankelevich, Yuri A ^a   Popov, Nikolay A ^a   Rakhimova, Tatyana V ^a   Rakhimov, Alexander T ^a  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

CHF3 electron impact cross section set; CHF3 contained plasma; Plasma chemical simulation

Indexed keywords

CHAIN REACTIONS; CHF3 ELECTRON IMPACT CROSS-SECTION SET; CHF3-CONTAINED PLASMA; EXPERIMENTAL DATUM; GAS-PHASE; GAS-PHASE KINETICS; GAS-PHASE REACTIONS; KINETIC SCHEMES; PARTIAL DISSOCIATIONS;

PHASE INTERFACES; PLASMAS;

TABLE LOOKUP;

EID: 65449177231     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2007.906780     Document Type: Article

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