Uncertainty and sensitivity analysis of gas-phase chemistry in a CHF3 plasma

Plasma Sources Science and Technology

Volumn 12, Issue 2, 2003, Pages 225-234

  Bose, Deepak ^a   Rao, M V V S ^a   Govindan, T R ^a   Meyyappan, M ^a  

^a NASA AMES RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLUOROCARBONS; MATHEMATICAL MODELS; REACTION KINETICS; SENSITIVITY ANALYSIS;

GAS PHASE CHEMISTRY; GAS SURFACE MECHANISMS; UNCERTAINTY ANALYSIS;

PLASMAS;

EID: 0037945850     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/12/2/314     Document Type: Article

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