Nano and nanocomposite superhard coatings of silicon carbonitride and titanium diboride by magnetron Sputtering

International Journal of Applied Ceramic Technology

Volumn 6, Issue 3, 2009, Pages 345-354

  Mishra, Suman Kumari ^a  

^a NATIONAL METALLURGICAL LABORATORY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

COMPLEX PROPERTIES; DIBORIDES; ELASTIC RECOVERIES; HIGH HARDNESS; LIFE-TIME; LOW FRICTIONS; MATRIXES; NANO-COATINGS; NANO-CRYSTALLINE; NANO-SIZE GRAINS; PROMISING MATERIALS; SILICON CARBO NITRIDES; STEEL SUBSTRATES; SUPERHARD COATINGS; TITANIUM DIBORIDE; XPS;

AMORPHOUS CARBON; AMORPHOUS FILMS; BORIDES; CARBON FILMS; CARBON NITRIDE; HARDNESS; MAGNETRONS; NANOCOMPOSITES; NANOCRYSTALLINE SILICON; SEMICONDUCTING SILICON COMPOUNDS; SILICON NITRIDE; STEEL RESEARCH; TITANIUM; UNLOADING;

AMORPHOUS SILICON;

EID: 65449147094     PISSN: 1546542X     EISSN: 17447402     Source Type: Journal    
DOI: 10.1111/j.1744-7402.2008.02287.x     Document Type: Article

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