Surface and nanoindentation studies on nanocrystalline titanium diboride thin film deposited by magnetron sputtering

Thin Solid Films

Volumn 515, Issue 17, 2007, Pages 6884-6889

  Mishra, S K ^a   Rupa, P K P ^a   Pathak, L C ^a  

^a NATIONAL METALLURGICAL LABORATORY   (India)

Author keywords

Hard coatings; Nanoindentation; Sputtering; Thin films; Titanium diboride

Indexed keywords

DEPOSITION; HARD COATINGS; MAGNETRON SPUTTERING; NANOCRYSTALLINE MATERIALS; NANOINDENTATION; SURFACE PHENOMENA; TITANIUM COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

DIRECTION ORIENTED PERPENDICULAR; ELASTIC RECOVERY; INTERPLANAR SPACINGS; TITANIUM DIBORIDE;

THIN FILMS;

EID: 34247638464     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.02.076     Document Type: Article

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