|
Volumn 200, Issue 12-13, 2006, Pages 4078-4081
|
Nucleation and growth of DC magnetron sputtered titanium diboride thin films
|
Author keywords
Hard coatings; Nucleation and growth; Thin films; Titanium diboride
|
Indexed keywords
ATOMIC FORCE MICROSCOPY;
BORIDES;
CONDUCTIVE FILMS;
FILM GROWTH;
MAGNETRON SPUTTERING;
MICROHARDNESS;
NUCLEATION;
SCANNING ELECTRON MICROSCOPY;
SURFACE ROUGHNESS;
THIN FILMS;
TITANIUM COMPOUNDS;
TRANSMISSION ELECTRON MICROSCOPY;
HARD COATINGS;
LAYERED GROWTH;
NANO-CRYSTALLINITY;
TITANIUM DIBORIDE;
PROTECTIVE COATINGS;
ATOMIC FORCE MICROSCOPY;
BORIDES;
CONDUCTIVE FILMS;
FILM GROWTH;
MAGNETRON SPUTTERING;
MICROHARDNESS;
NUCLEATION;
PROTECTIVE COATINGS;
SCANNING ELECTRON MICROSCOPY;
SURFACE ROUGHNESS;
THIN FILMS;
TITANIUM COMPOUNDS;
TRANSMISSION ELECTRON MICROSCOPY;
|
EID: 32644484522
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.10.006 Document Type: Article |
Times cited : (6)
|
References (12)
|