SCOPUS 정보 검색 플랫폼

Volumn 81, Issue 8, 2005, Pages 1583-1586

Reduction of capillary force for high-aspect ratio nanofabrication

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CONTACT ANGLE; DRYING; HOLOGRAPHY; LITHOGRAPHY;

CAPILLARY FORCE; HIGH-ASPECT RATIO PATTERNING; PATTERN TRANSFER;

NANOTECHNOLOGY;

EID: 27244442230 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-005-3337-7 Document Type: Review

Times cited : (77)

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