SU8 protective layers in liquid operating SAWs

Sensors and Actuators, B: Chemical

Volumn 118, Issue 1-2, 2006, Pages 374-379

  Arana, N ^a   Puente, D ^a   Ayerdi, I ^a   Castano E ^a   Berganzo, J ^b  

^a CEIT   (Spain)

^b IK4 IKERLAN   (Spain)

Author keywords

Liquid viscosity; SAW sensors; SU8 protective layers

Indexed keywords

DAMPING; DURABILITY; SILICA; TITANIUM; VISCOSITY; WAVE PROPAGATION;

LIQUID VISCOSITY; SAW SENSORS; SU8 PROTECTIVE LAYERS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 33748191746     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2006.04.083     Document Type: Article

References (9)

1. Vellekoop M.J. Acoustic waves sensors and their technology. Ultrasonics 36 (1998) 7-14
2. Turton A.C., Bhattacharyya D., and Wood D. High sensitivity Love-mode liquid density sensors. Sens. Actuators A (2005) available on line
3. Nathan M., Levy O., and Ruzin A. J. Appl. Phys. 94 12 (2003)
4. N.-T. Nguyen, S.T. Wereley, Fundamentals and Applications of Microfluidics, Artech House, 2002.
5. Auld B.A. Acoustic Fields and Waves in Solids vol. II (1990), Krieger, Florida
6. L.J. Guerin. The SU8 homepage. http://www.microchem.com/products/su_eight.htm.
7. Kovacs G., Vellekoop M.J., Haueis R., Lubking G.W., and Venema A. A Love wave sensor for biochemical sensing in liquids. Sens. Actuators A 43 (1994) 38-43
8. Jakoby B., and Vellekoop M.J. Viscosity sensor using a Love-wave device. Sens. Actuators A 68 (1998) 275-281
9. Du J., Harding G.L., Ogivily J.A., Dencher P.R., and Lake M. A study of Love-wave acoustic sensors. Sens. Actuators A 56 (1996) 211-219