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Volumn 80, Issue 3, 2005, Pages 621-626

Polymeric optical waveguides using direct ultraviolet photolithography process

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; BIREFRINGENCE; CLADDING (COATING); DENSE WAVELENGTH DIVISION MULTIPLEXING; HALOGENATION; INTEGRATED OPTICS; OPTICAL INTERCONNECTS; OPTICAL SWITCHES; OPTICAL WAVEGUIDES; PHOTOLITHOGRAPHY; PHOTORESISTS; PYROLYSIS; REFRACTIVE INDEX; SINGLE MODE FIBERS; TRANSPARENCY; ULTRAVIOLET RADIATION;

EID: 10844240672     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00339-003-2248-8     Document Type: Article
Times cited : (163)

References (24)
  • 13
    • 10844263779 scopus 로고    scopus 로고
    • note
    • SU-8 2000 polymer is supplied by MicroChem Corp. and the detailed reaction mechanism for the polymer can be requested from this company


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.