Design and fabrication of an electro-thermal microactuator with multidirectional in-plane motion

Journal of Microlithography, Microfabrication and Microsystems

Volumn 4, Issue 3, 2005, Pages

  Pan, Chi Hsiang ^a   Chang, Chia Lung ^b   Chen, Yi Kun ^b  

^a NATIONAL CHIN YI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^b NATIONAL YUNLIN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Electro thermal; In plane; Microactuator; Multidirectional motion

Indexed keywords

ELECTRO-THERMAL; IN-PLANE; MULTIDIRECTIONAL MOTION; SELECTIVE DOPING;

BOUNDARY CONDITIONS; HEAT TRANSFER; MICROMACHINING; POLYSILICON; SEMICONDUCTING FILMS; THERMAL EXPANSION;

MICROACTUATORS;

EID: 33644776029     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.2040448     Document Type: Article

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