Bi-directional electrothermal electromagnetic actuators

Journal of Micromechanics and Microengineering

Volumn 17, Issue 5, 2007, Pages 975-982

  Cao, Andrew ^a   Kim, Jongbaeg ^b   Lin, Liwei ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DEGRADATION; LORENTZ FORCE; MICROMACHINING; RELIABILITY THEORY; SILICON ON INSULATOR TECHNOLOGY;

ELECTROTHERMAL ELECTROMAGNETIC ACTUATORS; MICRO-RELAYS; RELIABILITY TESTS;

ACTUATORS;

EID: 34247548329     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/5/018     Document Type: Article

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