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Microsystem Technologies

Volumn 8, Issue 1, 2002, Pages 47-50

An electro-thermally driven microactuator with two dimensional motion

(2) Wu, C T a Hsu, W a

a NATIONAL CHIAO TUNG UNIVERSITY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BIMORPH STRUCTURES;

ELECTRIC POTENTIAL; MICROMACHINING; RESIDUAL STRESSES; THERMAL EXPANSION; THERMOELECTRIC EQUIPMENT;

MICROACTUATORS;

EID: 0036493914 PISSN: 09467076 EISSN: None Source Type: Journal
DOI: 10.1007/s00542-001-0129-7 Document Type: Article

Times cited : (15)

References (8)

1
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- (1989) Proc of IEEE Micro Electro Mechanical Systems , pp. 53-59
- Tang, W.C.¹ Nguyen, T.-C.H.² Howe, R.T.³

2
- 0031681677
- A rotary electrostatic micromotor 1 × 8 optical switch
- The Eleventh Annual International Workshop
- (1998) Proc of Micro Electro Mechanical Systems, MEMS 98 , pp. 116-120
- Yasseen, A.A.¹ Mitchell, J.² Streit, T.³ Smith, D.A.⁴ Merhergany, M.⁵

3
- 0032051226
- Automated assembly of flip-up micromirrors
- (1998) Sensors and Actuators A , vol.66 , pp. 292-298
- Reid, J.R.¹ Bright, V.M.² Butler, J.T.³

4
- 0041526122
- Dynamic actuation of polyimide V-groove joints by electrical heating
- (1998) Sensors and Actuators A , vol.67 , pp. 199-204
- Ebefors, T.¹ Kälvesten, E.² Stemme, G.³

5
- 0029487499
- Design, fabrication and testing of a C-shape actuator
- Solid-State Sensors and Actuators (Transducers'95/Eurosensors IX) Stockholm, Sweden
- (1995) Tech Digest, 8th International Conference , vol.2 , pp. 416-419
- Lin, G.¹ Kim, C.-J.² Konishi, S.³ Fujita, H.⁴

6
- 0027876248
- Fabrication and operation of polyimide bimorph actuators for a ciliary motion system
- (1993) J Microelectromech Syst , vol.2 , Issue.4 , pp. 146-150
- Takeshima, N.¹ Fujita, H.² Ataka, M.³

7
- 0026982125
- Thermo-magnetic metal flexure actuators
- (1992) Tech Digest of IEEE Solid State Sensor and Actuator Workshop , pp. 73-75
- Guckel, H.¹ Klein, J.² Christenson, T.³ Skrobis, K.⁴ Landon, M.⁵ Lovell, E.G.⁶

8
- 0003945231
- MCNC MEMS Technology Applications Center, Research Triangle Park, NC 27709, USA
- (1996) Multi-User MEMS Processes (MUMPS) Introduction and Design Rules, rev 4
- Koester, D.¹ Majedevan, R.² Shishkoff, A.³ Marcus, K.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.