A reliable single-layer out-of-plane micromachined thermal actuator

Sensors and Actuators, A: Physical

Volumn 103, Issue 1-2, 2003, Pages 48-58

  Chen, Wen Chih ^a   Chu, Chien Cheng ^a   Hsieh, Jerwei ^a   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Bulk micromachining; Delamination; Fatigue test; Thermal actuator

Indexed keywords

DELAMINATION; FATIGUE TESTING; INTERFACES (MATERIALS); MICROMACHINING; NATURAL FREQUENCIES; THIN FILMS; VIBRATIONS (MECHANICAL);

THERMAL ACTUATORS;

MICROACTUATORS;

EID: 0037438905     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00315-1     Document Type: Conference Paper

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