Modelization and characterization of asymmetrical thermal micro-actuators

Journal of Micromechanics and Microengineering

Volumn 6, Issue 1, 1996, Pages 134-137

  Lerch, Ph ^a   Kara Slimane, C ^a   Romanowicz, B ^a   Renaud, Ph ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; COMPUTER SIMULATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; STIFFNESS; SUBSTRATES;

THERMAL MICROACTUATORS;

ACTUATORS;

EID: 0030091403     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/1/033     Document Type: Article

References (3)

1. Guckel H, Klein J, Christenson T, Skrobis K, Laudon M, Lovell E G, 1992 Thermomagnetic metal flexure actuators Tech. Digest, Solid-State Sensor and Actuator Workshop (Hilton Head Island, SC, 1992) p 73
2. Kara Slimane C 1995 Diploma work, IMT-EPFL, Lausanne
3. Lorenz H, Paratte L, Luthier R, de Rooij N F and Renaud Ph Low cost technology for multilayer electroplated parts using laminated dry film resist Proc. Eurosensors IX & Transducers 95 (Stockholm, 1995)