Vertical thermal actuators for micro-opto-electro-mechanical systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3226, Issue , 1997, Pages 137-146

  Cowan, William D ^a   Bright, Victor M ^a  

^a Air Force Institute of Technology   (United States)

Author keywords

Actuators; Micro electro mechanical systems (MEMS); Micro opto electro mechanical (MOEM) systems; Micromirrors

Indexed keywords

BACKBENDING; DIFFERENT SIZES; DRIVE CURRENTS; DRIVE POWERS; EXPANSION ARMS; INTERFEROMETRIC MICROSCOPES; LARGE DEFLECTIONS; M SQUARES; MECHANICAL SYSTEMS; MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS); MICRO-OPTO-ELECTRO-MECHANICAL (MOEM) SYSTEMS; MICROMIRRORS; OPTICAL BEAM STEERING; SET-UPS; STEERING ANGLES; THERMAL ACTUATORS;

ACTUATORS; APPLICATIONS; COMPOSITE MICROMECHANICS; DEFLECTION (STRUCTURES); MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; MIRRORS; POLYSILICON; SURFACE MICROMACHINING;

ELECTROSTATIC ACTUATORS;

EID: 0000675407     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.284561     Document Type: Conference Paper

References (11)

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