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Volumn 38, Issue 4, 2009, Pages 574-580
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Defect analysis of barrier height inhomogeneity in titanium 4H-SiC schottky barrier diodes
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Author keywords
Barrier height; Crystal defects; Schottky barrier diode; Silicon carbide; Threading dislocations
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Indexed keywords
ACTIVE AREAS;
ATOMIC FORCES;
BARRIER HEIGHT;
BARRIER HEIGHT INHOMOGENEITY;
CURRENT-VOLTAGE MEASUREMENTS;
DEFECT ANALYSIS;
I-V CHARACTERISTICS;
IDEALITY FACTORS;
KOH ETCHINGS;
POSITIVE CORRELATIONS;
SCHOTTKY BARRIER DIODE;
THREADING DISLOCATIONS;
DEFECT DENSITY;
DEFECTS;
DISLOCATIONS (CRYSTALS);
DISPLAY DEVICES;
OPTICAL MICROSCOPY;
SEMICONDUCTING SILICON COMPOUNDS;
SEMICONDUCTOR DIODES;
SILICON CARBIDE;
TITANIUM;
SCHOTTKY BARRIER DIODES;
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EID: 61849121872
PISSN: 03615235
EISSN: None
Source Type: Journal
DOI: 10.1007/s11664-008-0647-5 Document Type: Conference Paper |
Times cited : (13)
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References (21)
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