Inhomogeneous electrical characteristics in 4H-SiC Schottky diodes

Semiconductor Science and Technology

Volumn 22, Issue 12, 2007, Pages 1287-1291

  Ewing, D J ^a   Wahab, Q ^b   Ciechonski, R R ^b   Syvajarvi M ^b   Yakimova, R ^b   Porter, L M ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CURRENT VOLTAGE CHARACTERISTICS; DEEP LEVEL TRANSIENT SPECTROSCOPY; ELECTRON ENERGY LEVELS; SEMICONDUCTING SILICON COMPOUNDS;

DEFECT CLUSTERS; ELECTRON BEAM INDUCED CURRENT (EBIC); EPITAXIAL GROWTH METHODS; INHOMOGENEOUS DIODES;

SCHOTTKY BARRIER DIODES;

EID: 36448932008     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/22/12/008     Document Type: Article

References (17)

1. Nuedeck P G and Powell J A 1994 IEEE Trans. Electon. Devices 15 63
2. Kimoto T, Miyamoto N and Matsunami H 1999 IEEE Trans. Electon. Devices 46 471
3. Wahab Q, Ellison A, Henry A, Janzén E, Hallin C, Di Persio J and Martinez R 2000 Appl. Phys. Lett. 76 2725
4. Scaltrito L et al 2003 Mater. Sci. Forum 433-436 455
5. Bhatnagar M, Baliga B J, Kirk H R and Rozgonyi G A 1999 IEEE Trans. Electon. Devices 43 150
6. Defives D, Noblanc O, Dua C, Brylinski C, Barthula M and Meyer F 1999 Mater. Sci. Eng. B 61-62 395
7. Skromme B J, Luckowski E, Moore K, Bhatnagar M, Weitzel C E, Gehoski T and Ganser D 2000 J. Electron. Mater. 29 376
8. Danielsson E, Lee S-K, Zetterling C-M and stling M 2001 J. Electron. Mater. 30 247
9. Plank N O V, Jiang L, Gundlach A M and Cheung R 2003 J. Electron. Mater. 32 964
10. Ewing D J, Porter L M, Wahab Q, Ma X, Sudarshan T, Tumakha S, Gao M and Brillson L J 2007 J. Appl. Phys. 101 114514
11. Kordina O, Irvine K, Sumakeries J, Kong H S, Paisly M J and Carter C H 1998 Mater. Sci. Forum 264-268 107
12. Syväjärvi M, Yakimova R, Tuominen M, Kakanakova-Georgieva A, MacMillan M F, Henry A, Wahab Q and Janzén E 1999 J. Crystal Growth 197 155
13. Rhoderick E H 1978 Metal-Semiconductor Contacts (Oxford: Clarendon Press)
14. Schnabel C M, Tabib-Azar M, Neudeck P G, Bailey S G, Su H B, Dudley M and Raffaelle R P 2000 Mater. Sci. Forum 338-342 489
15. Skromme B J et al 2003 Mater. Res. Soc. Proc. 742 181
16. Dalibor T, Pensl G, Matsunami H, Kimoto T, Choyke W J, Schöner A and Nordell N 1997 Phys. Status. Solidi. a 162 199
17. Tumakha S, Ewing D J, Porter L M, Wahab Q, Ma X, Sudarshan T S and Brillson L J 2005 Appl. Phys. Lett. 87 242106