Defect reduction in sublimation grown SiC bulk crystals

Superlattices and Microstructures

Volumn 40, Issue 4-6 SPEC. ISS., 2006, Pages 320-327

  Schmitt, Erwin ^a   Straubinger, Thomas ^a   Rasp, Michael ^a   Weber, Arnd Dietrich ^a  

^a SICRYSTAL AG   (Germany)

Author keywords

Basal plane dislocations; Bulk growth; Dislocation; Low angle grain boundaries; Micropipes; Numerical simulation; Schottky diode; SiC; Slip systems

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL GROWTH; DISLOCATIONS (CRYSTALS); GRAIN BOUNDARIES; PARAMETER ESTIMATION; SCHOTTKY BARRIER DIODES; SILICON CARBIDE; X RAY DIFFRACTION ANALYSIS;

BASAL PLANE DISLOCATIONS; BULK GROWTH; LOW ANGLE GRAIN BOUNDARIES; MICROPIPES; SLIP SYSTEMS;

CRYSTALS;

EID: 33845190090     PISSN: 07496036     EISSN: 10963677     Source Type: Journal    
DOI: 10.1016/j.spmi.2006.06.007     Document Type: Article

References (18)

1. Hergenrother K.M., Mayer S.E., and Mlavsky A.I. Silicon Carbide (1960), Pergamon Press p. 60
2. Tairov Y.M., and Tsvetkov V.F. J. Cryst. Growth. 43 (1978) 209
3. Ziegler G., Lanig P., Theis D., and Weyrich C. IEEE Trans. Electron. Dev. 30 (1983) 277
4. Frank F.C. Acta Crystallogr. 4 (1951) 497
5. Hofmann D., Schmitt E., Bickermann M., Kölbl M., Wellmann P.J., and Winnacker A. Mater. Sci. Eng. B 61-62 (1999) 48
6. Schmitt E., Eckstein R., Kölbl M., and Weber A.-D. Mater. Res. Soc. Proc. 572 (1999) 271
7. Stein R.A. Physica B 185 (1993) 211
8. E. Emorhokpor, E. Carlson, J. Wan, A. Weber, C. Basceri, J. Jenny, R. Sandhu, J. Oliver, F. Burkeen, A. Somanchi, V. Velidandla, F. Orazio, A. Blew, M. Goorsky, M. Dudley, W.M. Vetter, poster @ ICSCRM05 (in press)
9. Glass R.C., Kjellberg L.O., Tsvetkov V.F., Sundgren J.E., and Janzen E. J. Cryst. Growth. 132 (1993) 504
10. Takahashi J., Othani N., and Kanaya M. J. Cryst. Growth. 167 (1996) 596
11. Katsuno M., Othani N., Aigo T., Fujimoto T., Tsuge H., Yashiro H., and Kanaya M. J. Cryst. Growth. 216 (2000) 256
12. Ha S., Nuhfer N.T., De Graef M., Rohrer G.S., and Skowronski M. Mater. Sci. Forum 338-342 (2000) 477
13. Ha S., Skowronski M., Vetter W.M., and Dudley M. J. Appl. Phys. 92 2 (2002) 778
14. Lendenmann H., Dahlquist F., Bergman J.P., Bleichner H., and Hallin C. Mater. Sci. Forum 389-393 (2002) 1259
15. Maeda K., Suzuki K., Fujita S., Ichihara M., and Hyodo S. Phil. Mag. A 57 4 (1988) 573
16. Pilyankevich A.N., and Britun V.F. Phys. Status Solidi a 82 (1984) 449
17. Zhang Z., and Sudarshan T.S. Appl. Phys. Lett. 87 (2005) 1
18. Hull D., and Bacon D.J. Introduction to Dislocations. 3rd ed. (1984), Pergamon p. 161