Size effect of dissipative surface stress on quality factor of microbeams

Applied Physics Letters

Volumn 94, Issue 5, 2009, Pages

  Ru, C Q ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

BANDPASS FILTERS; Q FACTOR MEASUREMENT; SURFACE PROPERTIES; SURFACE TENSION; TENSILE STRENGTH;

BULK MATERIALS; CROSS SECTIONS; EXPLICIT FORMULAS; FREQUENCY DEPENDENTS; MICRO-BEAMS; QUALITY FACTORS; SIZE EFFECTS; SURFACE STRESS; ZENER MODELS;

SURFACES;

EID: 59849127963     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3078816     Document Type: Article

References (34)

1. R. E. Miller and V. B. Shenoy, Nanotechnology 0957-4484 10.1088/0957-4484/11/3/301 11, 139 (2000).
2. D. W. Dareing and T. J. Thundat, Appl. Phys. (Berlin) 97, 043526 (2005). 0340-3793
3. X. Wu and Y. A. Dzenis, J. Appl. Phys. 0021-8979 10.1063/1.2403976 100, 124318 (2006).
4. C. Q. Chen, Y. Shi, Y. S. Zhang, J. Zhu, and Y. J. Yan, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.96.075505 96, 075505 (2006).
5. G. F. Wang and X. Q. Feng, Appl. Phys. Lett. 0003-6951 10.1063/1.2746950 90, 231904 (2007).
6. M. R. Shankar and A. H. King, Appl. Phys. Lett. 0003-6951 10.1063/1.2718487 90, 141907 (2007).
7. J. G. Guo and Y. P. Zhao, Nanotechnology 0957-4484 10.1088/0957-4484/18/ 29/295701 18, 295701 (2007).
8. G. Stan, C. V. Ciobanu, P. M. Parthangal, and R. F. Cook, Nano Lett. 1530-6984 10.1021/nl071986e 7, 3691 (2007).
9. M. Riaz, O. Nur, M. Willander, and P. Klason, Appl. Phys. Lett. 0003-6951 10.1063/1.2894184 92, 103118 (2008).
10. H. S. J. Park, Appl. Phys. (Berlin) 103, 123504 (2008). 0340-3793
11. R. E. Rudd and B. Lee, Mol. Simul. 0892-7022 10.1080/08927020701730435 34, 1 (2008).
12. T. Y. Zhang, M. Luo, and W. K. Chan, J. Appl. Phys. 0021-8979 10.1063/1.2927453 103, 104308 (2008).
13. G. Stan, S. Krylyuk, A. V. Davydov, M. Vaudin, L. A. Bendersky, and R. F. Cook, Appl. Phys. Lett. 0003-6951 10.1063/1.2945285 92, 241908 (2008).
14. C. Zener, Elasticity and Anelasticity of Metals (University of Chicago Press, Chicago, 1948).
15. K. Y. Yasumura, T. D. Stowe, E. M. Chow, T. Pfafman, T. W. Kenny, B. C. Stipe, and D. Rugar, J. Microelectromech. Syst. 1057-7157 10.1109/84.825786 9, 117 (2000).
16. P. Mohanty, D. A. Harrington, K. L. Ekinci, Y. T. Yang, M. J. Murphy, and M. L. Roukes, Phys. Rev. B 0163-1829 10.1103/PhysRevB.66.085416 66, 085416 (2002).
17. A. N. Cleland, Foundations of Nanomechanics (Springer, Berlin, 2003).
18. M. S. Blanter, I. S. Golovin, H. Neuhauser, and H. R. Sinning, Internal Friction in Metallic Materials (Springer, Berlin, 2007).
19. H. Ibach, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.579122 12, 2240 (1994).
20. B. E. White and R. O. Pohl, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.75.4437 75, 4437 (1995).
21. J. Yang, T. Ono, and M. Esashi, J. Microelectromech. Syst. 1057-7157 10.1109/JMEMS.2002.805208 11, 775 (2002).
22. D. F. Wang, T. Ono, and M. Esashi, Nanotechnology 0957-4484 10.1088/0957-4484/15/12/028 15, 1851 (2004).
23. X. Liu, J. F. Vignola, H. J. Simpson, B. R. Lemon, B. H. Houston, and D. M. Photiadis, J. Appl. Phys. 0021-8979 10.1063/1.1819980 97, 023524 (2005).
24. K. L. Ekinci and M. L. Roukes, Rev. Sci. Instrum. 0034-6748 10.1063/1.1927327 76, 061101 (2005).
25. J. A. Henry, Y. Wang, D. Sengupta, and M. A. Hines, J. Phys. Chem. B 1089-5647 10.1021/jp0654011 111, 88 (2007).
26. G. J. Palasantzas, J. Appl. Phys. 0021-8979 10.1063/1.2714792 101, 076103 (2007).
27. M. Imboden, P. Mohanty, A. Gaidarzhy, J. Rankin, and B. W. Sheldon, Appl. Phys. Lett. 0003-6951 10.1063/1.2732163 90, 173502 (2007).
28. C. Seoanez and F. Guines, Phys. Rev. B 0163-1829 10.1103/PhysRevB.77. 125107 77, 125107 (2008).
29. I. Dufour, F. Lochon, S. M. Heinrich, F. Josse, and D. Rebiere, IEEE Sens. J. 1530-437X 10.1109/JSEN.2006.888600 7, 230 (2007).
30. R. Cox, F. Josse, M. J. Wenzel, S. M. Heinrich, and I. Dufour, Anal. Chem. 80, 5760 (2008). 0002-7820
31. I. H. Shames and F. A. Cozzarelli, Elastic and Inelastic Stress Analysis (Prentice-Hall, New Jersey, 1992).
32. C. Y. Nam, P. Jaroenapibal, D. Tham, D. E. Luzzi, S. Evoy, and J. E. Fischer, Nano Lett. 1530-6984 10.1021/nl051860m 6, 153 (2006).
33. X. L. Feng, R. He, P. Yang, and M. L. Roukes, Nano Lett. 1530-6984 10.1021/nl0706695 7, 1953 (2007).
34. D. A. Smith, V. C. Holmberg, D. C. Lee, and B. A. J. Korgel, J. Phys. Chem. C 112, 10725 (2008).