Time-resolved measurements of Cl2 density in high-density plasmas and application

Applied Physics Letters

Volumn 88, Issue 5, 2006, Pages 1-3

  Cunge, Gilles ^a   Mori, Masahito ^a   Kogelschatz, Martin ^a   Sadeghi, Nader ^b  

^a Joseph Fourier University   (France)

^b CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY MEASUREMENT (SPECIFIC GRAVITY); LASERS; LIGHT ABSORPTION; LIGHT SOURCES; PLASMAS; YTTERBIUM;

CHAMBER WALLS CONDITIONS; CHLORINE DENSITY; HIGH DENSITY PLASMAS; INDUSTRIAL ETCH REACTORS;

CHLORINE;

EID: 31944437026     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2171768     Document Type: Article

References (15)

1. S. Samukawa, Appl. Phys. Lett. 68, 316 (1996).
2. L. Sha and J. P. Chang, J. Vac. Sci. Technol. A 22, 88 (2004).
3. K. Zhu, V. Kuryatkov, B. Borisov, G. Kipshidze, S. A. Nikishin, H. Temkin, and M. Holtz, Appl. Phys. Lett. 81, 4688 (2002).
4. W. T. Lim, I. K. Baek, J. W. Lee, E. S. Lee, M. H. Jeon, G. S. XCho, Y. W. Heo, D. P. Norton, and S. J. Pearton, Appl. Phys. Lett. 83, 3105 (2003).
5. M. V. Malyshev and V. M. Donnelly, J. Appl. Phys. 88, 6207 (2000).
6. T. Panagopoulos, D. Kim, V. Midha, and D. J. Economou, J. Appl. Phys. 91, 2687 (2002).
7. F. Neuilly, J. P. Booth, and L. Vallier, J. Vac. Sci. Technol. A 20, 225 (2002).
8. L. G. Christophorou and J. K. Olthoff, J. Phys. Chem. Ref. Data 28, 131 (1999).
9. J. P. Booth, G. Cunge, F. Neuilly, and N. Sadeghi, Plasma Sources Sci. Technol. 7, 423 (1998).
10. M. Kogelschatz, G. Cunge, and N. Sadeghi, J. Phys. D 37, 1954 (2004).
11. G. Cunge, O. Joubert, and N. Sadeghi, J. Appl. Phys. 94, 6285 (2003).
12. G. Cunge, M. Nejbauer, and N. Sadeghi, Proceedings of Frontiers in Low Temperature Plasma Diagnostics, Les Houches, France, 2005.
13. S. J. Ullal, H. Singh, J. Daugherty, V. Vahedi, and E. S. Aydil, J. Vac. Sci. Technol. A 20, 1195 (2002).
14. G. P. Kota, J. W. Coburn, and D. B. Graves, J. Appl. Phys. 85, 74 (1998).
15. M. Kogelschatz, G. Cunge, and N. Sadeghi, J. Vac. Sci. Technol. A 22, 624 (2004).