Creation of GaAs microstructures using the nuclear nanoprobe LIPSION

Semiconductor Science and Technology

Volumn 23, Issue 12, 2008, Pages

  Menzel, F ^a   Spemann, D ^a   Lenzner, J ^a   Bohlmann W ^a   Zimmermann, G ^a   Butz, T ^a  

^a UNIVERSITY OF LEIPZIG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; ETCHING; GALLIUM ALLOYS; HELIUM; IRRADIATION; MICROSTRUCTURE; POROUS MATERIALS; SEMICONDUCTING GALLIUM; THREE DIMENSIONAL;

DIFFERENT MICROSTRUCTURES; ENERGY PROTONS; FOCUSED BEAMS; IRRADIATED REGIONS; MULTILEVEL STRUCTURES; NUCLEAR NANOPROBES; UNIRRADIATED MATERIALS;

ELECTROCHEMICAL ETCHING;

EID: 58149464688     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/23/12/125028     Document Type: Article

References (23)

1. Watt F, Breese M B H, Bettiol A A and van Kan J A 2007 Mater. Today 10 20-9
2. Bettiol A A, Teo E J, Udalagama C N B, Venugopal Rao S, van Kan J A, Shao P G and Watt F 2006 Proc. SPIE 6186 61860F
3. Marot L, Munnik F and Mikhalov S 2006 Appl. Surf. Sci. 252 7343-6
4. Polesello P et al 1999 Nucl. Instrum. Methods B 158 173-8
5. Teo E J, Tavernier E P, Breese M B H, Bettiol A A, Watt F, Liu M H and Blackwood D J 2004 Nucl. Instrum. Methods B 222 513-7
6. Yang P Y, Mashanovich G Z, Gomez-Morilla I, Headley W R, Reed G T, Teo E J, Blackwood D J, Breese M B H and Bettiol A A 2007 Appl. Phys. Lett. 90 241109
7. Mistry P, Gomez-Morilla I, Grime G W, Webb R, Jeynes C, Gwilliam R, Cansell A, Merchant M and Kirkby K J 2005 Nucl. Instrum. Methods B 231 428-32
8. Ruberto M N, Zhang X, Scarmozzino R, Willner A E, Podlesnik D V and Osgood Jr R M 1991 J. Electrochem. Soc. 138 1174-85
9. Menzel F, Spemann D, Petriconi S, Lenzner J and Butz T 2006 Nucl. Instrum. Methods B 250 66-70
10. Menzel F, Spemann D, Petriconi S, Lenzner J and Butz T 2007 Nucl. Instrum. Methods B 260 419-25
11. Breese M B H, Teo E J, Mangaiyarkarasi D, Champeaux F, Bettiol A A and Blackwood D 2005 Nucl. Instrum. Methods B 231 357-63
12. Nencsics A, Petrs L and Somogyi K 1990 Vacuum 41 1012-5
13. Ziegler J F 1977-1985 The Stopping and Range of Ions in Matter vol 2-6 (Oxford: Pergamon Press)
14. Breese M B H, Champeaux F J T, Teo E J, Bettiol A A and Blackwood D J 2006 Phys. Rev. B 73 035428
15. Föll H, Langa S, Carstensen J, Christopherson M and Tinginyanu I M 2003 Adv. Mater. 15 183-98
16. Carlson R O, Slack G A and Silverman S J 1964 J. Appl. Phys. 36 505-7
17. Teo E J, Breese M B H, Tavernier E P, Bettiol A A, Watt F, Liu M H and Blackwood D J 2004 Appl. Phys. Lett. 84 3202-4
18. Podlesnik D V, Gilgen H H and Osgood R M Jr 1984 Appl. Phys. Lett. 45 563-5
19. Bailey S G, Landis G A and Wilt D M 1989 J. Electrochem. Soc. 136 3444-9
20. Barycka I and Zubel I 1986 J. Mater. Sci. 21 2153-8
21. MacFadyen D N 1983 J. Electrochem. Soc. 130 1934-41
22. Mistry P et al 2007 Nucl. Instrum. Methods. Phys. Res. B 260 437-41
23. Clawson A R 2001 Mater. Sci. Eng. 31 1-438