Direct writing of microtunnels using proton beam micromachining

Applied Surface Science

Volumn 252, Issue 20, 2006, Pages 7343-7346

  Marot, Laurent ^a   Munnik, Frans ^a   Mikhaïlov, Sergueï ^a  

^a Ecole d'Ingenieurs de l'Arc Jurassien   (Switzerland)

Author keywords

Ion beam lithography; Micromachining; Microtunnels; PMMA

Indexed keywords

ASPECT RATIO; ELECTROFORMING; ION BEAM LITHOGRAPHY; MICROMACHINING; MOLDING; POLYMETHYL METHACRYLATES; X RAY LITHOGRAPHY;

MICROMOLDING; MICROTUNNELS; MOLECULAR CHAINS;

MICROSTRUCTURE;

EID: 33747159345     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.08.106     Document Type: Article

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