SCOPUS 정보 검색 플랫폼

Volumn 90, Issue 24, 2007, Pages

Freestanding waveguides in silicon

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMISTRY; ETCHING; MICROSTRUCTURE; PROTONS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON;

DIRECT-WRITE PROCESS; TRANSVERSE ELECTRIC POLARIZATION; TRANSVERSE MAGNETIC POLARIZATIONS;

WAVEGUIDES;

EID: 34250628114 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2749175 Document Type: Article

Times cited : (47)

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