Characterization of optical surfaces for the present generations of synchrotron sources

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7155, Issue , 2008, Pages

  Thomasset, M ^a   Polack, F ^a  

^a SYNCHROTRON SOLEIL   (France)

Author keywords

Figure; Optical surface; Profilometry; Roughness; Shack hartmann; Slope errors; Stitching interferometry; Synchrotron radiation

Indexed keywords

ELECTROMAGNETIC WAVES; INSTRUMENT ERRORS; INSTRUMENT SCALES; INTERFEROMETERS; INTERFEROMETRY; MEASUREMENT ERRORS; MIRRORS; OPTICAL DESIGN; OPTICAL TRANSFER FUNCTION; PHOTORESISTS; POWER SPECTRUM; PROFILOMETRY; SURFACE ROUGHNESS; SYNCHROTRON RADIATION; SYNCHROTRONS; TWO DIMENSIONAL;

FIGURE; OPTICAL SURFACE; ROUGHNESS; SHACK-HARTMANN; SLOPE ERRORS; STITCHING INTERFEROMETRY;

SURFACE PROPERTIES;

EID: 57549107686     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.814695     Document Type: Conference Paper

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