Surface metrology with a stitching Shack-Hartmann profilometric head

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6616, Issue PART 1, 2007, Pages

  Floriot, J ^a   Levecq, X ^a   Bucourt, S ^a   Thomasset, M ^b   Polack, F ^b   Idir, M ^b   Mercere P ^b   Brochet, S ^b   Moreno, T ^b  

^a Imagine Optic   (France)

^b SYNCHROTRON SOLEIL   (France)

Author keywords

Shack hartmann wavefront sensing; Stitching measurement; Surface figure measurement; Surface metrology

Indexed keywords

OPTICAL RESOLVING POWER; OPTICS; PRECISION ENGINEERING; SENSORS; WAVEFRONTS; WAVELENGTH;

HARTMANN WAVEFRONT SENSOR; SHACK-HARTMANN PROFILOMETRY; SURFACE FIGURE MEASUREMENT; SURFACE METROLOGY;

PROFILOMETRY;

EID: 36248999420     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.726058     Document Type: Conference Paper

References (10)

1. M. Thomasset, S. Brochet, F. Polack, "Latest metrology results with the SOLEIL synchrotron LTP", in Advances in Metrology forX-Ray andEUV Optics, L. Assoufid, P. Takacs, J. Taylor, eds, Proc. SPIE 5921, 12-20 (2005)
2. T.D. Raymond, D.R. Neal, D.M. Topa, T.L. Schmitz, "High-speed, non-interferometric nanotopographic characterization of Si wafer surfaces", in Nanoscale Optics and Applications, G. Cao, W. Kirk, eds., Proc. SPIE 4809, 208-216(2002)
3. W. H. Southwell, "Wavefront estimation from wavefront slope measurements", J. Opt. Soc. Am., 70, 998-1005 (1980)
4. P. Mercère, doctoral dissertation, Université Paris VI (2005)
5. Imagine Optic, patent PCT/FR02/02495 (July 2002)
6. M. Otsubo, K. Okada, J. Tsujiuchi, "Measurement of large plane surface shapes by connecting small-aperture interferograms", Opt. Eng. 33, 608-613 (1994)
7. K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasahu, T. Ishikawa, Y. Mori, "Microstitching interferometry for x-ray reflective optics", Rev. Sci. Instrum. 74, 2894-2898 (2003)
8. H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, K. Yamauchi "Relative angle determinable stitching interferometry for hard x-ray reflective optics", Rev. Sci. Instrum. 76, 045102 (2005)
9. J. Floriot and al., "A Shack-Hartmann measuring head for the 2D characterization of X-ray mirrors", submitted to J. of Synchrotron Radiation
10. th ed., Pergamon Press, New York, 1980