|
Volumn 5252, Issue , 2004, Pages 305-313
|
Stitching Interferometry: Recent results and Absolute calibration
a
a
MB Optique
(France)
|
Author keywords
Absolute Surface Shape Metrology; Interferometry; Optical Metrology; Stitching Interferometry
|
Indexed keywords
CALIBRATION;
CUSTOMER SATISFACTION;
ERROR ANALYSIS;
IMAGE ANALYSIS;
LASERS;
MATHEMATICAL MODELS;
MIRRORS;
THERMAL EFFECTS;
ABSOLUTE SURFACE SHAPE METROLOGY;
OPTICAL METROLOGY;
STITCHING INTERFEROMETRY;
INTERFEROMETRY;
|
EID: 1942478437
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.516164 Document Type: Conference Paper |
Times cited : (18)
|
References (5)
|