Recent advanced in sub-aperture approaches to finishing and metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6149, Issue , 2006, Pages

  Tricard, Marc ^a   Dumas, Paul ^a   Forbes, Greg ^a   DeMarco, Mike ^a  

^a QED TECHNOLOGIES   (United States)

Author keywords

Aspheric fabrication; Magnetorheological Finishing (MRF); Metrology; Polishing; Stitching interferometry

Indexed keywords

COMPUTER AIDED SOFTWARE ENGINEERING; MAGNETIC FIELD EFFECTS; POLISHING; RHEOLOGY; SINGLE CRYSTALS; SURFACE ROUGHNESS;

ASPHERIC FABRICATION; MAGNETORHEOLOGICAL FINISHING (MRF); STITCHING INTERFEROMETRY;

FINISHING;

EID: 33646425560     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.674189     Document Type: Conference Paper

References (17)

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