The Nanometer Optical Component Measuring Machine

Springer Series in Optical Sciences

Volumn 137, Issue , 2008, Pages 193-200

  Siewert, Frank ^a   Lammert, Heiner ^a   Zeschke, Thomas ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

Aspherical Surface; Estimate Measurement Uncertainty; Line Scan; Plane Mirror; Temperature Control Measuring

Indexed keywords

EID: 77950851590     PISSN: 03424111     EISSN: 15561534     Source Type: Book Series    
DOI: 10.1007/978-3-540-74561-7_11     Document Type: Chapter

References (10)

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