SCOPUS 정보 검색 플랫폼

Volumn 4782, Issue , 2002, Pages 21-28

3-D surface profile measurements of large x-ray synchrotron radiation mirrors using stitching interferometry

Author keywords

Long trace profiler; Optical metrology; Phase measuring interferometry; Stitching interferometry; Synchrotron radiation; X ray mirrors

Indexed keywords

COMPUTER SIMULATION; FUSED SILICA; INTERFEROMETRY; MIRRORS; PERTURBATION TECHNIQUES; SURFACE TOPOGRAPHY; SYNCHROTRON RADIATION;

PHASE MEASURING INTERFEROMETRY;

X RAY OPTICS;

EID: 0038302716 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.454816 Document Type: Conference Paper

Times cited : (13)

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