A Shack-Hartmann measuring head for the two-dimensional characterization of X-ray mirrors

Journal of Synchrotron Radiation

Volumn 15, Issue 2, 2008, Pages 134-139

  Floriot, Johan ^a   Levecq, Xavier ^a   Bucourt, Samuel ^a   Thomasset, Muriel ^b   Polack, François ^b   Idir, Mourad ^b   Mercére, Pascal ^b   Moreno, Thierry ^b   Brochet, Sylvain ^b  

^a Imagine Optic ^*  (France)

^b SYNCHROTRON SOLEIL   (France)

Author keywords

Long trace profilometer; Shack Hartmann wavefront sensing; Stitching measurement; Surface figure metrology; X ray mirror

Indexed keywords

MEASUREMENT THEORY; SYNCHROTRONS; WAVEFRONTS; WAVELENGTH; X RAY ANALYSIS;

SHACK-HARTMANN WAVEFRONT SENSING; X-RAY MIRRORS;

MIRRORS;

EID: 40049112379     PISSN: 09090495     EISSN: 16005775     Source Type: Journal    
DOI: 10.1107/S0909049507066083     Document Type: Article

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