메뉴 건너뛰기




Volumn 55, Issue 11, 2008, Pages 2968-2976

Size dependence of surface-roughness-limited mobility in silicon-nanowire FETs

Author keywords

Effective mobility; Nonequilibrium Green's functions (NEGFs); Quasi ballistic transport; Silicon nanowire (Si NW); Surface roughness (SR)

Indexed keywords

BALLISTICS; DIFFERENTIAL EQUATIONS; ELECTRIC WIRE; FIELD EFFECT TRANSISTORS; FRICTION; GREEN'S FUNCTION; MESFET DEVICES; MOSFET DEVICES; NANOSTRUCTURES; NANOWIRES; SILICON; SILICON COMPOUNDS; SURFACE PROPERTIES; SURFACE ROUGHNESS; THREE DIMENSIONAL; WIRE;

EID: 56549113551     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2008.2005164     Document Type: Article
Times cited : (76)

References (28)
  • 1
    • 0035793378 scopus 로고    scopus 로고
    • Functional nanoscale electronic devices assembled using silicon nanowire building blocks
    • Feb
    • Y. Cui and C. M. Lieber, "Functional nanoscale electronic devices assembled using silicon nanowire building blocks," Science, vol. 291, no. 5505, pp. 851-853, Feb. 2001.
    • (2001) Science , vol.291 , Issue.5505 , pp. 851-853
    • Cui, Y.1    Lieber, C.M.2
  • 2
    • 0037459371 scopus 로고    scopus 로고
    • Small-diameter silicon nanowire surfaces
    • Mar
    • D. D. D. Ma, C. S. Lee, F. C. K. Au, S. Y. Tong, and S. T. Lee, "Small-diameter silicon nanowire surfaces," Science, vol. 299, no. 5614, pp. 1874-1887, Mar. 2003.
    • (2003) Science , vol.299 , Issue.5614 , pp. 1874-1887
    • Ma, D.D.D.1    Lee, C.S.2    Au, F.C.K.3    Tong, S.Y.4    Lee, S.T.5
  • 3
    • 46049102044 scopus 로고    scopus 로고
    • Gate-all-around (GAA) twin silicon nanowire MOSFET (TSNWFET) with 15 nm length gate and 4 nm radius nanowires
    • K. H. Yeo et al., "Gate-all-around (GAA) twin silicon nanowire MOSFET (TSNWFET) with 15 nm length gate and 4 nm radius nanowires," in IEDM Tech. Dig., 2006, pp. 1-4.
    • (2006) IEDM Tech. Dig , pp. 1-4
    • Yeo, K.H.1
  • 5
    • 23744458365 scopus 로고    scopus 로고
    • Theoretical investigation of surface roughness scattering in silicon nanowire transistors
    • Jul
    • J. Wang, E. Polizzi, A. Gosh, S. Datta, and M. Lundstrum, "Theoretical investigation of surface roughness scattering in silicon nanowire transistors," Appl. Phys. Lett., vol. 87, no. 4, p. 043 101, Jul. 2005.
    • (2005) Appl. Phys. Lett , vol.87 , Issue.4 , pp. 043-101
    • Wang, J.1    Polizzi, E.2    Gosh, A.3    Datta, S.4    Lundstrum, M.5
  • 6
    • 33947147843 scopus 로고    scopus 로고
    • Atomistic treatment of interface roughness in Si nanowire transistors with different channel orientations
    • Mar
    • M. Luisier, A. Schenk, and W. Fichtner, "Atomistic treatment of interface roughness in Si nanowire transistors with different channel orientations," Appl. Phys. Lett., vol. 90, no. 10, p. 102 103, Mar. 2007.
    • (2007) Appl. Phys. Lett , vol.90 , Issue.10 , pp. 102-103
    • Luisier, M.1    Schenk, A.2    Fichtner, W.3
  • 7
    • 40949157889 scopus 로고    scopus 로고
    • Modeling of surface-roughness scattering in ultrathin-body SOI MOSFETs
    • Sep
    • S. Jin, T.-W. Tang, and M. V. Fischetti, "Modeling of surface-roughness scattering in ultrathin-body SOI MOSFETs," IEEE Trans. Electron Devices, vol. 54, no. 9, pp. 2191-2203, Sep. 2007.
    • (2007) IEEE Trans. Electron Devices , vol.54 , Issue.9 , pp. 2191-2203
    • Jin, S.1    Tang, T.-W.2    Fischetti, M.V.3
  • 8
    • 0036713397 scopus 로고    scopus 로고
    • Low ballistic mobility in submicron HEMTs
    • Sep
    • M. S. Shur, "Low ballistic mobility in submicron HEMTs," IEEE Electron Device Lett., vol. 23, no. 9, pp. 511-513, Sep. 2002.
    • (2002) IEEE Electron Device Lett , vol.23 , Issue.9 , pp. 511-513
    • Shur, M.S.1
  • 9
    • 36148961269 scopus 로고    scopus 로고
    • On the apparent mobility in nanometric n-MOSFETs
    • Nov
    • M. Zilli, D. Esseni, P. Palestri, and L. Selmi, "On the apparent mobility in nanometric n-MOSFETs," IEEE Electron Device Lett., vol. 28, no. 11, pp. 1036-1039, Nov. 2007.
    • (2007) IEEE Electron Device Lett , vol.28 , Issue.11 , pp. 1036-1039
    • Zilli, M.1    Esseni, D.2    Palestri, P.3    Selmi, L.4
  • 10
    • 46049114538 scopus 로고    scopus 로고
    • Unexpected mobility degradation for very short devices: A new challenge for CMOS scaling
    • A. Cros et al., "Unexpected mobility degradation for very short devices: A new challenge for CMOS scaling," in IEDM Tech. Dig., 2006, pp. 663-666.
    • (2006) IEDM Tech. Dig , pp. 663-666
    • Cros, A.1
  • 11
    • 9944253353 scopus 로고    scopus 로고
    • Magnetoresistance characterization of nanometer Si metal-oxide-semiconductor transistors
    • Nov
    • Y. M. Meziani et al., "Magnetoresistance characterization of nanometer Si metal-oxide-semiconductor transistors," J. Appl. Phys. vol. 96, no. 10, pp. 5761-5765, Nov. 2004.
    • (2004) J. Appl. Phys , vol.96 , Issue.10 , pp. 5761-5765
    • Meziani, Y.M.1
  • 12
    • 14844320545 scopus 로고    scopus 로고
    • Characterization of the effective mobility by split C(V) technique in sub 0.1 μm Si and SiGe PMOSFETs
    • May
    • K. Romanjek, F. Andrieu, T. Ernst, and G. Ghibaudo, "Characterization of the effective mobility by split C(V) technique in sub 0.1 μm Si and SiGe PMOSFETs," Solid State Electron., vol. 49, no. 5, pp. 721-726, May 2005.
    • (2005) Solid State Electron , vol.49 , Issue.5 , pp. 721-726
    • Romanjek, K.1    Andrieu, F.2    Ernst, T.3    Ghibaudo, G.4
  • 13
    • 33645519414 scopus 로고    scopus 로고
    • J. Lusakowski et al., Ballistic and pocket limitations of mobility in nanometer Si metal-oxide semiconductor field-effect transistors, Appl. Phys. Lett., 87, no. 5, p. 053 507-3, Jul. 2005.
    • J. Lusakowski et al., "Ballistic and pocket limitations of mobility in nanometer Si metal-oxide semiconductor field-effect transistors," Appl. Phys. Lett., vol. 87, no. 5, p. 053 507-3, Jul. 2005.
  • 14
    • 33646524024 scopus 로고    scopus 로고
    • Differential magnetoresistance technique for mobility extraction in ultra-short channel FDSOI transistors
    • Apr
    • W. Chaisantikulwat et al., "Differential magnetoresistance technique for mobility extraction in ultra-short channel FDSOI transistors," Solid State Electron., vol. 50, no. 4, pp. 637-643, Apr. 2006.
    • (2006) Solid State Electron , vol.50 , Issue.4 , pp. 637-643
    • Chaisantikulwat, W.1
  • 15
    • 33751527412 scopus 로고    scopus 로고
    • Experimental comparison between sub-0.1-m ultrathin SOI single- and doublegate MOSFETs: Performance and mobility
    • Nov
    • J. Widiez, T. Poiroux, M. Vinet, M. Mouis, and S. Deleonibus, "Experimental comparison between sub-0.1-m ultrathin SOI single- and doublegate MOSFETs: Performance and mobility," IEEE Trans. Nanotechnol., vol. 5, no. 6, pp. 643-648, Nov. 2006.
    • (2006) IEEE Trans. Nanotechnol , vol.5 , Issue.6 , pp. 643-648
    • Widiez, J.1    Poiroux, T.2    Vinet, M.3    Mouis, M.4    Deleonibus, S.5
  • 16
    • 0000216412 scopus 로고
    • Spatial variation of currents and fields due to localized scatterers in metallic conduction
    • Jul
    • R. Landauer, "Spatial variation of currents and fields due to localized scatterers in metallic conduction," IBM J. Res. Develop., vol. 1, p. 233, Jul. 1957.
    • (1957) IBM J. Res. Develop , vol.1 , pp. 233
    • Landauer, R.1
  • 17
    • 33749406012 scopus 로고
    • Four-terminal phase-coherent conductance
    • Oct
    • M. Büttiker, "Four-terminal phase-coherent conductance," Phys. Rev. Lett., vol. 57, no. 14, pp. 1761-1764, Oct. 1986.
    • (1986) Phys. Rev. Lett , vol.57 , Issue.14 , pp. 1761-1764
    • Büttiker, M.1
  • 18
    • 39549118360 scopus 로고    scopus 로고
    • Monte Carlo study of apparent mobility reduction in nano-MOSFETs
    • K. Huet et al., "Monte Carlo study of apparent mobility reduction in nano-MOSFETs," in Proc. ESSDERC Conf., 2007, pp. 382-385.
    • (2007) Proc. ESSDERC Conf , pp. 382-385
    • Huet, K.1
  • 19
    • 33947233244 scopus 로고    scopus 로고
    • Effect of growth orientation and surface roughness on electron transport in silicon nanowires
    • Mar
    • A. Svizhenko, P. W. Leu, and K. Cho, "Effect of growth orientation and surface roughness on electron transport in silicon nanowires," Phys Rev. B, Condens. Matter, vol. 75, no. 12, p. 125 417, Mar. 2007.
    • (2007) Phys Rev. B, Condens. Matter , vol.75 , Issue.12 , pp. 125-417
    • Svizhenko, A.1    Leu, P.W.2    Cho, K.3
  • 20
    • 38849209164 scopus 로고    scopus 로고
    • A self-consistent full 3-D real-space NEGF simulator for studying nonperturbative effects in nano-MOSFETs
    • Sep
    • A. Martinez et al., "A self-consistent full 3-D real-space NEGF simulator for studying nonperturbative effects in nano-MOSFETs," IEEE Trans. Electron Devices, vol. 54, no. 9, pp. 2213-2222, Sep. 2007.
    • (2007) IEEE Trans. Electron Devices , vol.54 , Issue.9 , pp. 2213-2222
    • Martinez, A.1
  • 22
    • 40149089718 scopus 로고    scopus 로고
    • Simulation of silicon nanowire transistors using Boltzmann transport equation under relaxation time approximation
    • Mar
    • S. Jin, T.-W. Tang, and M. V. Fischetti, "Simulation of silicon nanowire transistors using Boltzmann transport equation under relaxation time approximation," IEEE Trans. Electron Devices, vol. 55, no. 3, pp. 727-736, Mar. 2008.
    • (2008) IEEE Trans. Electron Devices , vol.55 , Issue.3 , pp. 727-736
    • Jin, S.1    Tang, T.-W.2    Fischetti, M.V.3
  • 24
    • 33646498298 scopus 로고    scopus 로고
    • Influence of band structure on electron ballistic transport in silicon nanowire MOSFETs: An atomistic study
    • Apr
    • K. Nehari, N. Cavassilas, J. L. Autran, M. Bescond, D. Munteanu, and M. Lannoo, "Influence of band structure on electron ballistic transport in silicon nanowire MOSFETs: An atomistic study," Solid State Electron. vol. 50, no. 4, pp. 716-721, Apr. 2006.
    • (2006) Solid State Electron , vol.50 , Issue.4 , pp. 716-721
    • Nehari, K.1    Cavassilas, N.2    Autran, J.L.3    Bescond, M.4    Munteanu, D.5    Lannoo, M.6
  • 25
    • 33748300947 scopus 로고    scopus 로고
    • Quantum transport in two-and three-dimensional nanoscale transistors: Coupled mode effects in the nonequilibrium Green's function formalism
    • Aug
    • M. Luisier, A. Schenk, and W. Fichtner, "Quantum transport in two-and three-dimensional nanoscale transistors: Coupled mode effects in the nonequilibrium Green's function formalism," J. Appl. Phys., vol. 100, no. 4, p. 043 713, Aug. 2006.
    • (2006) J. Appl. Phys , vol.100 , Issue.4 , pp. 043-713
    • Luisier, M.1    Schenk, A.2    Fichtner, W.3
  • 26
    • 18644369368 scopus 로고    scopus 로고
    • Simulating quantum transport in nanoscale transistors: Real versus mode-space approaches
    • Oct. 1
    • R. Venugopal, Z. Ren, S. Datta, and M. Lundstrom, "Simulating quantum transport in nanoscale transistors: Real versus mode-space approaches," J. Appl. Phys., vol. 92, no. 7, pp. 3730-3739, Oct. 1, 2002.
    • (2002) J. Appl. Phys , vol.92 , Issue.7 , pp. 3730-3739
    • Venugopal, R.1    Ren, Z.2    Datta, S.3    Lundstrom, M.4
  • 27
    • 0036494049 scopus 로고    scopus 로고
    • A compact scattering model for the nanoscale double-gate MOSFET
    • Mar
    • A. Rahman and M. S. Lundstrom, "A compact scattering model for the nanoscale double-gate MOSFET," IEEE Trans. Electron Devices, vol. 49, no. 3, pp. 481-489, Mar. 2002.
    • (2002) IEEE Trans. Electron Devices , vol.49 , Issue.3 , pp. 481-489
    • Rahman, A.1    Lundstrom, M.S.2
  • 28
    • 0036927506 scopus 로고    scopus 로고
    • Experimental study of carrier transport mechanism in ultrathin-body SOI n- and p-MOSFETs with SOI thickness less than 5 nm
    • K. Uchida et al., "Experimental study of carrier transport mechanism in ultrathin-body SOI n- and p-MOSFETs with SOI thickness less than 5 nm," in IEDM Tech. Dig., 2002, pp. 47-50.
    • (2002) IEDM Tech. Dig , pp. 47-50
    • Uchida, K.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.