Improvements in the accuracy and the repeatability of long trace profiler measurements

Applied Optics

Volumn 38, Issue 25, 1999, Pages 5468-5479

  Takacs, Peter Z ^a   Church, Eugene L ^a   Bresloff, Cynthia J ^b   Assoufid, Lahsen ^c  

^a BROOKHAVEN NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF ARIZONA   (United States)

^c ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038800777     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.38.005468     Document Type: Article

References (28)

1. P. Z. Takacs, S. K. Feng, E. L. Church, S. Qian, and W. Liu, “Long trace profile measurements on cylindrical aspheres,” in Advances in Fabrication and Metrology for Optics and Large Optics, J. B. Arnold and R. A. Parks, eds., Proc. SPIE 966, 354-364 (1989).
2. P. Z. Takacs, K. Furenlid, R. DeBiasse, and E. L. Church, “Surface topography measurements over the 1 meter to 10 micrometer spatial period bandwidth,” in Surface Characterization and Testing II, J. E. Grievenkamp and M. Young, eds., Proc. SPIE 1164, 203-211 (1989).
3. W. B. Emerson, “Determination of planeness and bending of optical flats,” J. Res. Natl. Bur. Stand. 49(4), 241-247 (1952).
4. G. D. Dew, “The measurement of optical flatness,” J. Sci. Instrum. 43, 409-415 (1966).
5. W. Primak, “The determination of the absolute contours of optical flats,” Appl. Opt. 6, 1917-1923 (1967).
6. G. Schulz and J. Schwider, “Precise measurement of planeness,” Appl. Opt. 6, 1077-1084 (1967).
7. W. Primak, “Optical flatness standard,” Opt. Eng. 23 (6), 806-815 (1984).
8. W. Primak, “Optical flatness standard: comment,” Opt. Eng. 28 (8), 934 (1989).
9. Lord Rayleigh, “Interference bands and their applications,” Nature (London) 48, 212-214 (1893).
10. H. Barrell and R. Marriner, “Liquid surface interferometry,” Nature (London) 162, 529-530 (1948).
11. R. Bunnagel, “Untersuchungen uber die Eignung eines Flus-sigkeitsspiegels als Ebenheitsnormal,” Z. Angew. Phys. 8(7), 342-350 (1956).
12. I. Powell and E. Goulet, “Absolute figure measurements with a liquid-flat reference,” Appl. Opt. 37, 2579-2588 (1998).
13. G. Schulz and J. Grzanna, “Absolute flatness testing by the rotation method with optimal measuring-error compensation,” Appl. Opt. 31, 3767-3780 (1992).
14. P. Hariharan, “Interferometric testing of optical surfaces: absolute measurements of flatness,” Opt. Eng. 36, 2478-2481 (1997).
15. S. C. Irick, W. R. McKinney, D. L. T. Lunt, and P. Z. Takacs, “Using a straightness reference in obtaining more accurate surface profiles,” Rev. Sci. Instrum. 63, 1436-1438 (1992).
16. S. C. Irick, “Improved measurement accuracy in a long trace profiler: compensation for laser pointing instability,” Nucl. Instrum. Methods Phys. Res. A 347, 226-230 (1994).
17. S. C. Irick, “Determining surface profile from sequential interference patterns from a long trace profiler,” Rev. Sci. Instrum. 63, 1432-1435 (1992).
18. S. C. Irick, “Advancements in one-dimensional profiling with a long trace profiler,” in International Symposium on Optical Fabrication, Testing, and Surface Evaluation, J. Tsujiuchi, ed., Proc. SPIE 1720, 162-168 (1992).
19. S. Qian, W. Jark, and P. Z. Takacs, “The Penta-Prism LTP: a long-trace-profiler with stationary optical head and moving penta-prism,” Rev. Sci. Instrum. 66, 2562-2569 (1995).
20. W. McKinney, S. C. Irick, and D. J. Lunt, “XUV synchrotron optical components for the Advanced Light Source: summary of the requirements and the developmental program,” in Optics for High-Brightness Synchrotron Radiation Beamlines, J. Arthur, ed., Proc. SPIE 1740, 154-160 (1993).
21. P. Z. Takacs, K. Furenlid, and E. L. Church, “In search of the elusive true surface,” in Advanced Optical Manufacturing and Testing, G. M. Sanger, P. B. Reid, L. Baker, eds., Proc. SPIE 1333, 205-219 (1990).
22. P. Z. Takacs and C. J. Bresloff, “Significant improvements in long trace profiler measurement performance,” in Optics for High-Brightness Synchrotron Radiation Beamlines II, L. E. Berman and J. Arthur, eds., Proc. SPIE 2856, 236-245 (1996).
23. K. von Bieren, “Pencil beam interferometer for aspherical optical surfaces,” in Laser Diagnostics, S. Holly, ed., Proc. SPIE 343, 101-108 (1982).
24. K. von Bieren, “Interferometry of wavefronts reflected off conical surfaces,” Appl. Opt. 22, 2109-2114 (1983).
25. J. Susini, R. Baker, and A. Vivo, “Optical metrology facility at the ESRF,” Rev. Sci. Instrum. 66, 2232-2234 (1995).
26. U.S. Department of Defense, Optical Design, Military Standardization Handbook, MIL-HDBK-141 (Defense Supply Agency, Washington, D.C., 1962).
27. D. J. Whitehouse, Handbook of Surface Metrology (Institute of Physics, Philadelphia, Pa., 1994).
28. E. L. Church and P. Z. Takacs are preparing a manuscript to be called “Signal and noise analysis of LTP measurements.” J. Strong, Concepts of Classical Optics (Freeman, San Francisco, Calif., 1958), pp. 281-282.