Elimination of 'ghost'-effect-related systematic errors in metrology of X-ray optics with a long trace profiler

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5858, Issue , 2005, Pages 1-8

  Yashchuk, Valeriy V ^a   Irick, Steve C ^a   MacDowell, Alastair A ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Metrology; Systematic error reduction; Trace profiler; X ray optics

Indexed keywords

CONTAMINATION; ERROR CORRECTION; MIRRORS; PERTURBATION TECHNIQUES; SIGNAL INTERFERENCE; SYSTEMATIC ERRORS;

SYSTEMATIC ERROR REDUCTION; TRACE PROFILER; X-RAY MIRROR; X-RAY OPTICS;

X RAY ANALYSIS;

EID: 28844458366     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.612386     Document Type: Conference Paper

References (19)

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