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Volumn 39, Issue 1, 2000, Pages 304-310

Precision calibration and systematic error reduction in the long trace profiler

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; ERROR ANALYSIS; FOURIER TRANSFORMS; MEASUREMENT ERRORS; OPTICAL INSTRUMENT LENSES; PHOTODETECTORS; SCANNING;

EID: 0033888254     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.602364     Document Type: Article
Times cited : (43)

References (22)
  • 1
    • 79952535634 scopus 로고
    • Design of a long trace surface profiler
    • Metrology: Figure and Finish, B. E. Truax, Ed.
    • P. Z. Takacs and S. N. Qian, "Design of a long trace surface profiler," in Metrology: Figure and Finish, B. E. Truax, Ed., Proc. SPIE 749, 59-64 (1987).
    • (1987) Proc. SPIE , vol.749 , pp. 59-64
    • Takacs, P.Z.1    Qian, S.N.2
  • 3
    • 0000637816 scopus 로고
    • The penta-prism LTP: A long-trace-profiler with stationary optical head and moving pentaprism
    • S. N. Qian, W. Jark, and P. Z. Takacs, "The penta-prism LTP: a long-trace-profiler with stationary optical head and moving pentaprism," Rev. Sci. Instrum. 66, 2562-2569 (1995).
    • (1995) Rev. Sci. Instrum. , vol.66 , pp. 2562-2569
    • Qian, S.N.1    Jark, W.2    Takacs, P.Z.3
  • 4
    • 0010715288 scopus 로고    scopus 로고
    • Measurement of x-ray telescope mirrors using a vertical scanning long trace profiler
    • H. Z. Li, X. J. Li, M. W. Grindel, and P. Z. Takacs, "Measurement of x-ray telescope mirrors using a vertical scanning long trace profiler," Opt. Eng. 35(2), 330-338 (1996).
    • (1996) Opt. Eng. , vol.35 , Issue.2 , pp. 330-338
    • Li, H.Z.1    Li, X.J.2    Grindel, M.W.3    Takacs, P.Z.4
  • 5
    • 0010755068 scopus 로고    scopus 로고
    • Vertical scanning long trace profiler: A tool for metrology of x-ray mirrors
    • H. Z. Li, P. Z. Takacs, and T. Oversluizen, "Vertical scanning long trace profiler: a tool for metrology of x-ray mirrors," Proc. SPIE 3152, 180-187 (1997).
    • (1997) Proc. SPIE , vol.3152 , pp. 180-187
    • Li, H.Z.1    Takacs, P.Z.2    Oversluizen, T.3
  • 6
    • 0001296998 scopus 로고
    • In situ surface profiler for high heat load mirror measurement
    • S. N. Qian, W. Jark, P. Z. Takacs, K. J. Randall, and W. B. Yun, "In situ surface profiler for high heat load mirror measurement," Opt. Eng. 34(2), 396-402 (1995).
    • (1995) Opt. Eng. , vol.34 , Issue.2 , pp. 396-402
    • Qian, S.N.1    Jark, W.2    Takacs, P.Z.3    Randall, K.J.4    Yun, W.B.5
  • 8
    • 0031162596 scopus 로고    scopus 로고
    • Precise measuring method for detecting the in situ distortion profile of a high-heat-load mirror for synchrotron radiation by use of a pentaprism long trace profiler
    • S. N. Qian, W. Jark, G. Sostero, A. Gambitta, F. Mazzolini, and A. Savoia, "Precise measuring method for detecting the in situ distortion profile of a high-heat-load mirror for synchrotron radiation by use of a pentaprism long trace profiler," Appl. Opt. 36(16), 3769-3775 (1997).
    • (1997) Appl. Opt. , vol.36 , Issue.16 , pp. 3769-3775
    • Qian, S.N.1    Jark, W.2    Sostero, G.3    Gambitta, A.4    Mazzolini, F.5    Savoia, A.6
  • 9
    • 0032224004 scopus 로고    scopus 로고
    • Mirror distortion measurements with an in-situ LTP
    • P. Z. Takacs, S. N. Qian, K. Randall, W. B. Yun, and H. Z. Li, "Mirror distortion measurements with an in-situ LTP," Proc. SPIE 3447, 117-124 (1998).
    • (1998) Proc. SPIE , vol.3447 , pp. 117-124
    • Takacs, P.Z.1    Qian, S.N.2    Randall, K.3    Yun, W.B.4    Li, H.Z.5
  • 10
    • 0029728701 scopus 로고    scopus 로고
    • Penta-prism long trace profiler (PPLTP) for measurement of grazing incidence space optics
    • S. N. Qian, H. Z. Li, and P. Z. Takacs, "Penta-prism long trace profiler (PPLTP) for measurement of grazing incidence space optics," Proc. SPIE 2805, 108-114 (1996).
    • (1996) Proc. SPIE , vol.2805 , pp. 108-114
    • Qian, S.N.1    Li, H.Z.2    Takacs, P.Z.3
  • 11
    • 36449001810 scopus 로고
    • Using a straightness reference in obtaining more accurate surface profiles from a long trace profiler
    • S. C. Irick, W. Mckinney, D. J. Lunt, and P. Z. Takacs, "Using a straightness reference in obtaining more accurate surface profiles from a long trace profiler," Rev. Sci. Instrum. 63(part IIB), 1436-1438 (1992).
    • (1992) Rev. Sci. Instrum. , vol.63 , Issue.PART IIB , pp. 1436-1438
    • Irick, S.C.1    McKinney, W.2    Lunt, D.J.3    Takacs, P.Z.4
  • 12
    • 4244031396 scopus 로고
    • Improved measurement accuracy in a long trace profiler: Compensation for laser pointing instability
    • S. C. Irick, "Improved measurement accuracy in a long trace profiler: compensation for laser pointing instability," Nucl. Instrum. Methods Phys. Res. A347, 226-230 (1994).
    • (1994) Nucl. Instrum. Methods Phys. Res. , vol.A347 , pp. 226-230
    • Irick, S.C.1
  • 13
    • 0040150909 scopus 로고
    • Determining surface profile from sequential interference patterns from a long trace profiler
    • S. C. Irick, "Determining surface profile from sequential interference patterns from a long trace profiler," Rev. Sci. Instrum. 63(1), 1432-1435 (1992).
    • (1992) Rev. Sci. Instrum. , vol.63 , Issue.1 , pp. 1432-1435
    • Irick, S.C.1
  • 14
    • 85010160969 scopus 로고
    • Advancements in one-dimensional profiling with a long trace profiler
    • Int. Symp. Optical Fabrication, Testing, and Surface Evaluation. J. Tsujiuchi, Ed.
    • S. C. Irick, "Advancements in one-dimensional profiling with a long trace profiler," in Int. Symp. Optical Fabrication, Testing, and Surface Evaluation. J. Tsujiuchi, Ed., Proc. SPIE 1720, 162-168 (1992).
    • (1992) Proc. SPIE , vol.1720 , pp. 162-168
    • Irick, S.C.1
  • 15
    • 0032224467 scopus 로고    scopus 로고
    • Error reduction techniques for measuring long synchrotron mirrors
    • S. C. Irick, "Error reduction techniques for measuring long synchrotron mirrors," Proc. SPIE 3441, 101-108 (1998).
    • (1998) Proc. SPIE , vol.3441 , pp. 101-108
    • Irick, S.C.1
  • 16
    • 0001592123 scopus 로고    scopus 로고
    • Improvement of synchrotron radiation mirrors below the 0.1 arcsec rms slope error limit with the help of a long trace profiler
    • H. Lammert, F. Senf, and M. Berger, "Improvement of synchrotron radiation mirrors below the 0.1 arcsec rms slope error limit with the help of a long trace profiler," Proc. SPIE 3447, 168-179 (1998).
    • (1998) Proc. SPIE , vol.3447 , pp. 168-179
    • Lammert, H.1    Senf, F.2    Berger, M.3
  • 17
    • 0000616448 scopus 로고    scopus 로고
    • Significant improvements in long trace profiler measurement performence
    • P. Z. Takacs and C. J. Bresloff, "Significant improvements in long trace profiler measurement performence," Proc. SPIE 2856, 236-245 (1996).
    • (1996) Proc. SPIE , vol.2856 , pp. 236-245
    • Takacs, P.Z.1    Bresloff, C.J.2
  • 18
    • 0020310505 scopus 로고
    • Pencil beam interferometer for aspherical optical surfaces
    • K. Von Bieren, "Pencil beam interferometer for aspherical optical surfaces," in Laser Diagnostics, Proc. SPIE 343, 101-108 (1982).
    • (1982) Laser Diagnostics, Proc. SPIE , vol.343 , pp. 101-108
    • Von Bieren, K.1
  • 19
    • 0020780345 scopus 로고
    • Interferometry of wave fronts reflected off conical surfaces
    • K. Von Bieren, "Interferometry of wave fronts reflected off conical surfaces," Appl. Opt. 22, 2109-2114 (1983).
    • (1983) Appl. Opt. , vol.22 , pp. 2109-2114
    • Von Bieren, K.1
  • 20
    • 0000500655 scopus 로고    scopus 로고
    • Advantages of the in-situ LTP distortion profile test on high-heat-load mirror and applications
    • S. N. Qian, W. Jark, G. Sostero, A. Gambitta, F. Mazzolini, and A. Savoia, "Advantages of the in-situ LTP distortion profile test on high-heat-load mirror and applications," Proc. SPIE 2856, 172-182 (1996).
    • (1996) Proc. SPIE , vol.2856 , pp. 172-182
    • Qian, S.N.1    Jark, W.2    Sostero, G.3    Gambitta, A.4    Mazzolini, F.5    Savoia, A.6
  • 21
    • 0342882616 scopus 로고
    • Angle calibration of the long trace profiler using a diffraction grating
    • S. C. Irick, "Angle calibration of the long trace profiler using a diffraction grating," Advanced Light Source Report LSBL-160 (1992).
    • (1992) Advanced Light Source Report LSBL-160
    • Irick, S.C.1
  • 22
    • 0027147928 scopus 로고
    • XUV synchrotron optical components for the advanced light source: Summary of the requirements and the developmental program
    • W. Mckinney, S. C. Irick, and D. J. Lunt, "XUV synchrotron optical components for the Advanced Light Source: summary of the requirements and the developmental program," in Optics for High-Brightness Synchrotron Radiation Beamlines, Proc. SPIE 1740, 154-160 (1992).
    • (1992) Optics for High-brightness Synchrotron Radiation Beamlines, Proc. SPIE , vol.1740 , pp. 154-160
    • Mckinney, W.1    Irick, S.C.2    Lunt, D.J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.