Precision calibration and systematic error reduction in the long trace profiler

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3782, Issue , 1999, Pages 627-636

  Qian, Shinan ^a   Sostero, Giovanni ^a   Takacs, Peter Z ^a  

^a BROOKHAVEN NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; FOCUSING; MEASUREMENT ERRORS; MIRRORS; OPTICAL INSTRUMENT LENSES; SCANNING; SPACE OPTICS; SYNCHROTRON RADIATION;

ANGLE CALIBRATION; LONG TRACE PROFILER; PENTAPRISM SCANNING TECHNIQUE; SLOPE ERROR MEASUREMENT; SYSTEMATIC ERROR REDUCTION;

OPTICAL INSTRUMENTS;

EID: 0033342736     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (23)