Large-mirror figure measurement by optical profilometry techniques

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3782, Issue , 1999, Pages 266-274

  Takacs, Peter Z ^a   Qian, Shinan ^a   Kester, Thomas ^a   Li, Haizhang ^a  

^a BROOKHAVEN NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPHERICS; ERROR DETECTION; MIRRORS; OPTICAL VARIABLES MEASUREMENT; SCANNING; SYNCHROTRON RADIATION; VACUUM TECHNOLOGY; X RAY APPARATUS;

ERROR SOURCES; LARGE OPTICS; LONG TRACE PROFILER; OPTICAL COMPONENTS; OPTICAL PROFILOMETRY; SCANNING OPTICAL PROFILER; X RAY MIRRORS;

INTERFEROMETERS;

EID: 0033308248     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)