Mechanical characteristics of tungsten-containing carbon nanosprings grown by FIB-CVD

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 808-810

  Nakamatsu, K ^a,b   Igaki, J ^a,b   Nagase, M ^c   Ichihashi, T ^d   Matsui, S ^a,b  

^a UNIVERSITY OF HYOGO   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c NTT Basic Research Laboratories   (Japan)

^d NEC CORPORATION   (Japan)

Author keywords

Focused ion beam chemical vapor deposition; Mechanical characteristics; Nanospring; Shear modulus; Spring constant; Tungsten containing carbon; Young's modulus

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELASTIC MODULI; ION BEAMS; MIXTURES; OLEFINS; OPTICAL MICROSCOPY; SPRINGS (COMPONENTS);

FOCUSED-ION-BEAM CHEMICAL VAPOR DEPOSITION; MECHANICAL CHARACTERISTICS; NANOSPRINGS; SPRING CONSTANTS; TUNGSTEN-CONTAINING CARBON;

NANOSTRUCTURED MATERIALS;

EID: 33748281408     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.130     Document Type: Article

References (9)

1. Matsui S., Kaito T., Fujita J., Komuro M., Kanda K., and Haruyama Y. J. Vac. Sci. Technol. B 18 (2000) 3181
2. Fujita J., Ishida M., Sakamoto T., Ochiai Y., Kaito T., and Matsui S. J. Vac. Sci. Technol. B 19 (2001) 2834
3. Nagase M., Nakamatsu K., Matsui S., and Namatsu H. Jpn. J. Appl. Phys. 44 (2005) 5409
4. Liu D.-L., Ye D.-X., Khan F., Tang F., Lim B.-K., Picu R.C., Wang G.-C., and Lu T.-M. J. Nanosci. Nanotechnol. 3 (2003) 492
5. Zhang, and Zhao Y. J. Appl. Phys 95 (2003) 267
6. Singh J.P., Liu D.-L., Ye D.-X., Picu R.C., Lu T.-M., and Wang G.-C. Appl. Phys. Lett. 84 (2003) 3657
7. Nakamatsu K., Nagase M., Namatsu H., and Matsui S. Jpn. J. Appl. Phys. B 44 (2005) L1228
8. Ishida M., Fujita J., Ichihashi T., Ochiai Y., Kaito T., and Matsui S. J. Vac. Sci. Technol. B 21 (2003) 2728
9. Ancker C.J., and Goodier J.N. J. Appl. Mech. 25 (1958) 466