Bulk carbon nanotubes as sensing element for temperature and anemometry micro sensing

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 41-44

  Wong, Victor T S ^a   Li, Wen J ^a  

^a CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ANEMOMETERS; CARBON NANOTUBES; ELECTROPHORESIS; HEAT RESISTANCE; MICROELECTROMECHANICAL DEVICES; NUMERICAL METHODS; POLYSILICON; TEMPERATURE; TEMPERATURE MEASUREMENT;

ANEMOMETRY MICROSENSING; RESISTANCE OVERHEAT; SHEAR STRESS SENSOR;

MICROSENSORS;

EID: 0038156120     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)

1. S. Iijima, "Helical Microtubules of Graphitic Carbon", Nature, Vol. 354, pp. 56-58 (1991)
2. E.W. Wong, P.E. Sheehan, C.M. Lieber, "Nanobeam Mechanics: Elasticity, Strength and Toughness of Nanorods and Nanotubes", Science, Vol. 277, pp. 1971-1975 (1997)
3. T.W. Ebbesen, H.J. Lezee, H. Hiura, J.W. Bennett, H.F. Ghaemi, T. Thio, "Electrical Conductivity of Individual Carbon Nanotubes", Nature, Vol. 382, pp. 54-56 (1996)
4. S. Frank, P. Poncharal, Z.L. Wang, W.A. de Heer, "Carbon Nanotube Quantum Resistors", Science, Vol. 280, pp. 1744-1746 (1998)
5. S.J. Tans, A.R.M. Verschueren, C. Dekker, "Room-Temperature Transistor Based on a Single Carbon Nanotube", Nature, Vol. 393, pp. 49-52 (1998)
6. R.H. Baughman, C. Cui, A.A. Zakhidov, Z. Iqbal, J.N. Barisci, G.M. Spinks, G.G. Wallace, A. Mazzoldi, D.D. Rossi, A.G. Rinzler, O. Jaschinski, S. Roth, M. Kertesz, "Carbon Nanotube Actuators", Science, Vol. 284, pp. 1340-1344 (1999)
7. W.B. Choi, D.S. Chung, J.H. Kang, H.Y. Kim, Y.W. Jin, I.T. Han, Y.H. Lee, J.E. Jung, N.S. Lee, G.S. Park, J.M. Kim, "Fully Sealed, High-Brightness Carbon-Nanotube Field-Emission Display", Applied Physics Letters, Vol. 75, No. 20, pp. 3129-3131 (1999)
8. G.B. Lee, A. Huang, C.M. Ho, F. Jiang, C. Grosjean, Y.C. Tai, "Sensing and Control of Aerodynamic Separation by MEMS", The Chinese Journal of Mechanics, Vol. 16, No. 1, pp. 45-52 (2000)
9. C. Liu, J.B. Huang, Z. Zhu, F. Jiang, S. Tung, Y.C. Tai, C.M. Ho, "A Micromachined Flow Shear-Stress Sensor Based on Thermal Transfer Principle", Journal of Microelectromechanical Systems, Vol. 8, No. 1, pp. 90-99 (1999)
10. M.P. Hughes, "AC Electrokinetics: Applications for Nanotechnology", Nanotechnology, Vol. 11, pp. 124-132 (2000)
11. K. Yamamoto, S. Akita, Y. Nakayama, "Orientation of Carbon Nanotubes using Electrophoresis", Japanese Journal of Applied Physics, Vol. 35, pp. L917-L918, (1996)
12. K. Yamamoto, S. Akita, Y. Nakayama, "Orientation and Purification of Carbon Nanotubes Using AC Electrophoresis", Journal of Physics D: Applied Physics, Vol. 31, pp. L34-L36 (1998)
13. H.A. Pohl, "Dielectrophoresis: The Behaviour of Neutral Matter in Nonuniform Electric Fields", Cambridge University Press (1978)
14. V.T.S. Wong, W.J. Li, "Dependence of AC Electrophoresis Carbon Nanotube Manipulation on Microelectrode Geometry", International Journal of Non-linear Sciences and Numerical Simulation, Vol. 3, Nos 3-4, pp. 769-774 (2002)
15. P.G. Collins, M.S. Arnold, P. Avouris, "Engineering Carbon Nanotubes and Nanotube Circuits Using Electrical Breakdown", Science, Vol. 292, pp. 706-709 (2001)