메뉴 건너뛰기




Volumn 4, Issue SUPPL.1, 2007, Pages

Preliminary synthesis of carbon nitride thin films by N2/CH4 microwave plasma assisted chemical vapour deposition: Characterisation of the discharge and the obtained films

Author keywords

Carbon nitride films; Microwave plasma assisted chemical vapour deposition (MPACVD); Optical emission spectroscopy (OES); Scanning electron microscopy (SEM); Transmission electron microscopy (TEM)

Indexed keywords

CARBON FILMS; CARBON NITRIDE; CHEMICAL VAPOR DEPOSITION; ELECTRIC DISCHARGES; ELECTRONS; FILM GROWTH; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; LIGHT EMISSION; MICROWAVES; NANOCRYSTALS; NITRIDES; OPTICAL EMISSION SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

EID: 55249089341     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200730703     Document Type: Conference Paper
Times cited : (5)

References (24)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.