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Materials Science and Engineering B: Solid-State Materials for Advanced Technology

Volumn 78, Issue 1, 2000, Pages 11-15

On the structure and composition of crystalline carbon nitride films synthesized by microwave plasma chemical vapor deposition

(6) Zhang, Y P a Gu, Y S b Chang, X R b Tian, Z Z b Shi, D X a Zhang, X F a

a INSTITUTE OF GEOLOGY AND GEOPHYSICS (China)

b UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING (China)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; METHANE; MICROWAVES; MORPHOLOGY; NITRIDES; NITROGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; STOICHIOMETRY; SYNTHESIS (CHEMICAL); THERMAL EFFECTS; THIN FILMS;

CARBON NITRIDE; MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION (MPCVD);

CRYSTALLINE MATERIALS;

EID: 0034292515 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-5107(00)00505-5 Document Type: Article

Times cited : (17)

References (16)

1
- 0000092194
- Cohen M.L. Phys Rev. B. 32:1985;7988.
- (1985) Phys Rev. B , vol.32 , pp. 7988
- Cohen, M.L.¹

2
- 20444373328
- Liu A.Y., Cohen M.L. Science. 245:1989;841.
- (1989) Science , vol.245 , pp. 841
- Liu, A.Y.¹ Cohen, M.L.²

3
- 0030569717
- Teter D.M., Hemley R.J. Science. 271:1996;53.
- (1996) Science , vol.271 , pp. 53
- Teter, D.M.¹ Hemley, R.J.²

4
- 0000140081
- Chen L.C., Yang C.Y., Bhusari D.M., Chen K.H., Lin M.C., Lin J.C., Chuang T.J. Diam. Relat. Mater. 5:1996;514.
- (1996) Diam. Relat. Mater. , vol.5 , pp. 514
- Chen, L.C.¹ Yang, C.Y.² Bhusari, D.M.³ Chen, K.H.⁴ Lin, M.C.⁵ Lin, J.C.⁶ Chuang, T.J.⁷

5
- 0000960924
- Johnson D.J., Chen Y., He Y., Pring R.H. Diam. Relat. Mater. 6:1997;1799.
- (1997) Diam. Relat. Mater. , vol.6 , pp. 1799
- Johnson, D.J.¹ Chen, Y.² He, Y.³ Pring, R.H.⁴

6
- 0342620671
- Chen L.C., Chen C.K., Wei S.L., Bhusari D.M., Chen K.H., Chen Y.F., Jong Y.C., Huang Y.S. Appl. Phys. Lett. 72:1998;2463.
- (1998) Appl. Phys. Lett. , vol.72 , pp. 2463
- Chen, L.C.¹ Chen, C.K.² Wei, S.L.³ Bhusari, D.M.⁴ Chen, K.H.⁵ Chen, Y.F.⁶ Jong, Y.C.⁷ Huang, Y.S.⁸

7
- 0032476279
- Lu T.R., Chen L.C., Chen K.H., Bhusari D.M., Chen T.M., Kuo C.T. Thin Solid Films. 332:1998;74.
- (1998) Thin Solid Films , vol.332 , pp. 74
- Lu, T.R.¹ Chen, L.C.² Chen, K.H.³ Bhusari, D.M.⁴ Chen, T.M.⁵ Kuo, C.T.⁶

8
- 0004744429
- Bhusari D.M., Chen C.K., Chen K.H. J. Mater. Res. 12:1997;332.
- (1997) J. Mater. Res. , vol.12 , pp. 332
- Bhusari, D.M.¹ Chen, C.K.² Chen, K.H.³

9
- 0001538689
- Tani Youji, Aoi Yoshifumi, Kamijo Eiji Appl. Phys. Lett. 73:1998;1652.
- (1998) Appl. Phys. Lett. , vol.73 , pp. 1652
- Tani, Y.¹ Aoi, Y.² Kamijo, E.³

10
- 0031103451
- Chen Y., Guo L., Wang E.G. Philos. Mag. Lett. 75:1997;155.
- (1997) Philos. Mag. Lett. , vol.75 , pp. 155
- Chen, Y.¹ Guo, L.² Wang, E.G.³

11
- 0000619062
- Zhang Y., Zhou Z., Li H. Appl. Phys. Lett. 68:1996;634.
- (1996) Appl. Phys. Lett. , vol.68 , pp. 634
- Zhang, Y.¹ Zhou, Z.² Li, H.³

12
- 0032628055
- Shi D.X., Zhang X.F., Yuan L., Gu Y.S., Zhang Y.P., Chang X.R., Tian Z.Z., Chen N.X Appl. Surf. Sci. 148:1999;50.
- (1999) Appl. Surf. Sci. , vol.148 , pp. 50
- Shi, D.X.¹ Zhang, X.F.² Yuan, L.³ Gu, Y.S.⁴ Zhang, Y.P.⁵ Chang, X.R.⁶ Tian, Z.Z.⁷ Chen, N.X.⁸

13
- 0032678230
- Gu Y.S., Zhang Y.P., Duan Z.J., Chang X.R., Tian Z.Z., Dong C., Shi D.X., Zhang X.F., Yuan L. J. Mater. Sci. 34:1999;3117.
- (1999) J. Mater. Sci. , vol.34 , pp. 3117
- Gu, Y.S.¹ Zhang, Y.P.² Duan, Z.J.³ Chang, X.R.⁴ Tian, Z.Z.⁵ Dong, C.⁶ Shi, D.X.⁷ Zhang, X.F.⁸ Yuan, L.⁹

14
- 12044253618
- Matton D., Boyd K.J., Al-Bayati A.H., Todorov S.S., Rabalais J.W. Phys. Rev. Lett. 73:1994;118.
- (1994) Phys. Rev. Lett. , vol.73 , pp. 118
- Matton, D.¹ Boyd, K.J.² Al-Bayati, A.H.³ Todorov, S.S.⁴ Rabalais, J.W.⁵

15
- 0000425478
- Ronning C., Feldermann H., Merk R. Phys. Rev. B. 58:1998;2207.
- (1998) Phys. Rev. B , vol.58 , pp. 2207
- Ronning, C.¹ Feldermann, H.² Merk, R.³

16
- 84899096654
- T.Y. Yen, C.P. Chou, Appl. Phys. Lett. 67.
- Appl. Phys. Lett. , pp. 67
- Yen, T.Y.¹ Chou, C.P.²

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