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Diamond and Related Materials

Volumn 8, Issue 8-9, 1999, Pages 1732-1736

Nitrogenated amorphous carbon films synthesized by electron cyclotron plasma enhanced chemical vapor deposition

(5) Chan, W C a Fung, M K a Bello, I a Lee, C S a Lee, S T a

a CITY UNIVERSITY OF HONG KONG (Hong Kong)

Author keywords

Nitrogenated amorphous carbon; Plasma enhanced chemical vapor deposition

Indexed keywords

COMPOSITION; COMPOSITION EFFECTS; ELECTRON CYCLOTRON RESONANCE; HARDNESS; HYDROGEN; MECHANICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PROTECTIVE COATINGS; RAMAN SPECTROSCOPY; SURFACE ROUGHNESS; SYNTHESIS (CHEMICAL);

ELASTIC RECOIL DETECTION ANALYSIS; NITROGENATED AMORPHOUS CARBON FILMS;

AMORPHOUS FILMS;

EID: 0032594133 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/s0925-9635(99)00017-5 Document Type: Article

Times cited : (14)

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