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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 2, 1998, Pages 455-462

Semiquantitative subplantation model for low energy ion interactions with surfaces. II. Ion beam deposition of carbon and carbon nitride

(4) Marton, D a Boyd, K J a,c Rabalais, J W a Lifshitz, Y b

a University of Houston (United States)

b SOREQ NUCLEAR RESEARCH CENTER (Israel)

c UNIVERSITY OF UTAH (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032382361 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.581043 Document Type: Article

Times cited : (29)

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